Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7576340 | Focused ion beam processing method | Ryoji Hagiwara, Tomokazu Kozakai | 2009-08-18 |
| 7297944 | Ion beam device and ion beam processing method, and holder member | Toshio Kodama, Masakatsu Hasuda, Toshiaki FUJI, Kouji Iwasaki, Yasuyuki Takagi | 2007-11-20 |
| 7276691 | Ion beam device and ion beam processing method | Toshio Kodama, Masakatsu Hasuda, Toshiaki Fujii, Kouji Iwasaki, Yasuyuki Takagi | 2007-10-02 |
| 7172839 | Photomask correction method using composite charged particle beam, and device used in the correction method | Junichi Tashiro, Anto Yasaka | 2007-02-06 |
| 6870161 | Apparatus for processing and observing a sample | Tatsuya Adachi, Toshiaki Fujii, Hiroshi Sawaragi | 2005-03-22 |
| 6838685 | Ion beam apparatus, ion beam processing method and sample holder member | Toshio Kodama, Masakatsu Hasuda, Toshiaki Fujii, Kouji Iwasaki, Yasuyuki Takagi | 2005-01-04 |
| 6489612 | Method of measuring film thickness | Toshio Kodama, Toshiaki Fujii | 2002-12-03 |
| 6472881 | Liquid metal ion source and method for measuring flow impedance of liquid metal ion source | Masamichi Oi | 2002-10-29 |
| 6437330 | Method and apparatus for adjusting a charged particle beam of a beam optical system | — | 2002-08-20 |
| 6384418 | Sample transfer apparatus and sample stage | Toshiaki Fujii | 2002-05-07 |
| 6331712 | Section formation observing method | Toshiaki Fujii | 2001-12-18 |
| 6300628 | Focused ion beam machining method and device thereof | Toshiaki Fujii, Toshio Doi | 2001-10-09 |
| 6281496 | Observing/forming method with focused ion beam and apparatus therefor | Kazuo Aita | 2001-08-28 |
| 6177670 | Method of observing secondary ion image by focused ion beam | — | 2001-01-23 |
| 6118122 | Ion beam working apparatus | Yoshihiro Koyama | 2000-09-12 |
| 5969355 | Focused ion beam optical axis adjustment method and focused ion beam apparatus | Toshiaki Fujii, Toshio Doi, Munenori Tasai | 1999-10-19 |
| 5917186 | Focused ion beam optical axis adjustment method and focused ion beam apparatus | Toshiaki Fujii | 1999-06-29 |
| 5438197 | Focused ion beam apparatus | Toshiaki Fujii | 1995-08-01 |