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Method for acquiring image and ion beam apparatus |
Tomokazu Kozakai, Fumio Aramaki, Osamu Matsuda, Kensuke SHIINA, Anto Yasaka |
2019-04-30 |
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Method for acquiring image and ion beam apparatus |
Tomokazu Kozakai, Fumio Aramaki, Osamu Matsuda, Kensuke SHIINA, Anto Yasaka |
2018-07-03 |
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Focused ion beam apparatus |
Anto Yasaka, Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Fumio Aramaki +1 more |
2017-10-17 |
| 9773634 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus |
Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Fumio Aramaki, Anto Yasaka +1 more |
2017-09-26 |
| 9583299 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus |
Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Fumio Aramaki, Anto Yasaka +1 more |
2017-02-28 |
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Repair apparatus |
Fumio Aramaki, Anto Yasaka, Osamu Matsuda, Yasuhiko Sugiyama, Hiroshi Oba +1 more |
2016-06-28 |
| 8999178 |
Method for fabricating emitter |
Yasuhiko Sugiyama, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka |
2015-04-07 |
| 8764994 |
Method for fabricating emitter |
Yasuhiko Sugiyama, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka |
2014-07-01 |
| 8274063 |
Composite focused ion beam device, process observation method using the same, and processing method |
Takashi Kaito, Yoshitomo Nakagawa, Junichi Tashiro, Yasuhiko Sugiyama, Toshiaki Fujii +1 more |
2012-09-25 |
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Composite focused ion beam device, and processing observation method and processing method using the same |
Takashi Kaito, Junichi Tashiro, Yasuhiko Sugiyama, Kouji Iwasaki, Toshiaki Fujii +1 more |
2012-09-18 |
| 7323685 |
Ion beam processing method |
Osamu Takaoka, Tomokazu Kozakai |
2008-01-29 |
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Method for extracting objective image |
— |
2006-09-05 |
| 6864475 |
Image sensor having uniform sensitivity |
Takashi Terada |
2005-03-08 |
| 6642512 |
Focused ion beam apparatus |
— |
2003-11-04 |
| 6544692 |
Black defect correction method and black defect correction device for photomask |
Osamu Takaoka |
2003-04-08 |
| 6467426 |
Photomask correction device |
Osamu Takaoka |
2002-10-22 |
| 6392230 |
Focused ion beam forming method |
— |
2002-05-21 |
| 6365905 |
Focused ion beam processing apparatus |
Yoshihiro Koyama |
2002-04-02 |
| 6281496 |
Observing/forming method with focused ion beam and apparatus therefor |
Yasuhiko Sugiyama |
2001-08-28 |
| 5854488 |
Ion beam machining method and device thereof |
— |
1998-12-29 |
| 5405734 |
Method for correcting a patterned film using an ion beam |
— |
1995-04-11 |
| 4942618 |
Method and apparatus for determining the shape of wire or like article |
Kazuhiko Sumi, Manabu Hashimoto, Yoshikazu Sakaue, Masahiro Sasakura, Yutaka Ozaki |
1990-07-17 |
