Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276343 | Method for acquiring image and ion beam apparatus | Tomokazu Kozakai, Osamu Matsuda, Kensuke SHIINA, Kazuo Aita, Anto Yasaka | 2019-04-30 |
| 10014157 | Method for acquiring image and ion beam apparatus | Tomokazu Kozakai, Osamu Matsuda, Kensuke SHIINA, Kazuo Aita, Anto Yasaka | 2018-07-03 |
| 9793085 | Focused ion beam apparatus | Anto Yasaka, Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Kazuo Aita +1 more | 2017-10-17 |
| 9793092 | Charged particle beam apparatus and processing method | Masashi Muramatsu, Tomokazu Kozakai | 2017-10-17 |
| 9773634 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Kazuo Aita, Anto Yasaka +1 more | 2017-09-26 |
| 9583299 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Kazuo Aita, Anto Yasaka +1 more | 2017-02-28 |
| 9418817 | Focused ion beam apparatus and control method thereof | Yasuhiko Sugiyama, Hiroshi Oba | 2016-08-16 |
| 9378858 | Repair apparatus | Anto Yasaka, Osamu Matsuda, Yasuhiko Sugiyama, Hiroshi Oba, Tomokazu Kozakai +1 more | 2016-06-28 |
| 9336979 | Focused ion beam apparatus with precious metal emitter surface | Anto Yasaka, Yasuhiko Sugiyama, Tomokazu Kozakai, Osamu Matsuda | 2016-05-10 |
| 8999178 | Method for fabricating emitter | Yasuhiko Sugiyama, Kazuo Aita, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka | 2015-04-07 |
| 8963100 | Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa | Anto Yasaka, Yasuhiko Sugiyama, Tomokazu Kozakai, Osamu Matsuda | 2015-02-24 |
| 8890093 | Charged particle beam apparatus and method for forming observation image | Tomokazu Kozakai, Osamu Matsuda | 2014-11-18 |
| 8764994 | Method for fabricating emitter | Yasuhiko Sugiyama, Kazuo Aita, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka | 2014-07-01 |
| 8460842 | Defect repair apparatus and method for EUV mask using a hydrogen ion beam | Takashi Ogawa, Hiroshi Oba, Anto Yasaka | 2013-06-11 |