Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322332 | Apparatus and method for measuring energy spectrum of backscattered electrons | Makoto Kato, Yukihiro Tanaka, Yuichiro Yamazaki | 2022-05-03 |
| 10515778 | Secondary particle detection system of scanning electron microscope | Susumu Takashima, Makoto Kato, Kazufumi Kubota, Yukihiro Tanaka, Yuichiro Yamazaki | 2019-12-24 |
| 9039052 | Mold structure and bumper | Hideyuki Seto, Shinichi Shimada, Shinichi Hanada, Akira Izumi | 2015-05-26 |
| 7592604 | Charged particle beam apparatus | Hirotami Koike, Shinichi Okada, Akira Higuchi, Masahiro Inoue, Masahiro Yamamoto | 2009-09-22 |
| 4851097 | Apparatus for repairing a pattern film | Osamu Hattori, Anton Yasaka, Yoshitomo Nakagawa, Mitsuyoshi Sato | 1989-07-25 |