Techniques for improving extracted ion beam quality using high-transparency electrodes

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• James S. Buff (16 patents)
• Svetlana B. Radovanov (54 patents)
• Bon-Woong Koo (78 patents)
• Wilhelm P. Platow (17 patents)
• Frank Sinclair (139 patents)
• D. Jeffrey Lischer (22 patents)
• Craig R. Chaney (45 patents)
• Steven C. Borichevsky (5 patents)
• Eric R. Cobb (13 patents)
• Mayur Jagtap (4 patents)
• Kenneth H. Purser (42 patents)
• Victor M. Benveniste (82 patents)
• Shardul S. Patel (15 patents)

View full patent text on Google Patents →