Model-based controlled load lock pumping scheme

Assignee

• Applied Materials

Inventors

• D. Jeffrey Lischer (22 patents)
• Bon-Woong Koo (78 patents)
• Dawei Sun (30 patents)
• Chi-Yang Cheng (2 patents)
• Paul J. Murphy (47 patents)
• Frank Sinclair (139 patents)
• Gregory Edward Stratoti (2 patents)
• Tseh-Jen Hsieh (24 patents)
• Wayne Chen (7 patents)
• Guy Oteri (3 patents)

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