Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8557712 | PECVD flowable dielectric gap fill | Bart J. van Schravendijk | 2013-10-15 |
| 8536073 | Hardmask materials | Vishwanathan Rangarajan, Ananda Banerji, Bart J. van Schravendijk | 2013-09-17 |
| 8479683 | Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer | Mandyam Sriram, Vishwanathan Rangarajan, Pramod Subramonium | 2013-07-09 |
| 8288292 | Depositing conformal boron nitride film by CVD without plasma | Mandyam Sriram, Vishwanathan Rangarajan, Pramod Subramonium | 2012-10-16 |
| 8268722 | Interfacial capping layers for interconnects | Jengyi Yu, Hui-Jung Wu, Girish Dixit, Bart J. van Schravendijk, Pramod Subramonium +2 more | 2012-09-18 |
| 8247332 | Hardmask materials | Vishwanathan Rangarajan, Ananda Banerji, Bart J. van Schravendijk | 2012-08-21 |
| 8217513 | Remote plasma processing of interface surfaces | Jennifer O'Loughlin, Tony Xavier, Mandyam Sriram, Bart J. van Schravendijk, Vishwanathan Rangarajan +2 more | 2012-07-10 |
| 8178443 | Hardmask materials | Vishwanathan Rangarajan, Bart J. van Schravendijk | 2012-05-15 |
| 8084339 | Remote plasma processing of interface surfaces | Jennifer O'Loughlin, Tony Xavier, Mandyam Sriram, Bart J. van Schravendijk, Vishwanathan Rangarajan +2 more | 2011-12-27 |
| 7858510 | Interfacial layers for electromigration resistance improvement in damascene interconnects | Ananda Banerji, Jennifer O'Loughlin, Mandyam Sriram, Bart J. van Schravendijk, Seshasayee Varadarajan | 2010-12-28 |
| 7799671 | Interfacial layers for electromigration resistance improvement in damascene interconnects | Ananda Banerji, Jennifer O'Ioughlin, Mandyam Sriram, Bart J. van Schravendijk, Seshasayee Varadarajan | 2010-09-21 |
| 7790630 | Silicon-doped carbon dielectrics | Michael Goodner | 2010-09-07 |
| 7648899 | Interfacial layers for electromigration resistance improvement in damascene interconnects | Ananda Banerji, Jennifer O'Loughlin, Mandyam Sriram, Bart J. van Schravendijk, Seshasayee Varadarajan | 2010-01-19 |
| 7019845 | Measuring elastic moduli of dielectric thin films using an optical metrology system | Sean P. Leary, Guray Tas, Christopher Morath, Michael Kotelyanskii, Tong Zheng +3 more | 2006-03-28 |