Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4789242 | Optical apparatus for detecting the position of an object | Shuhei Takagi, Koichi Matsumoto | 1988-12-06 |
| 4780616 | Projection optical apparatus for mask to substrate alignment | Kenji Nishi, Hidemi Kawai, Kazuaki Suzuki | 1988-10-25 |
| 4769750 | Illumination optical system | Koichi Matsumoto, Tetsuo Kikuchi | 1988-09-06 |
| 4730900 | Projection optical apparatus | Hideo Mizutani, Kiyoyuki Muramatsu, Takeshi Asami, Akikazu Tanimoto | 1988-03-15 |
| 4723846 | Optical path length compensating optical system in an alignment apparatus | Kazumasa Endo, Susumu Mori, Shuhei Takagi, Yukio Kakizaki | 1988-02-09 |
| 4677301 | Alignment apparatus | Akikazu Tanimoto, Toshio Matsuura, Seiro Murakami, Kyoichi Suwa | 1987-06-30 |
| 4637691 | Mirror converging-type illumination optical system | Sumio Hashimoto | 1987-01-20 |
| 4619508 | Illumination optical arrangement | Masato Shibuya | 1986-10-28 |
| 4603950 | Projection lens | Satoshi Mogami | 1986-08-05 |
| 4592625 | Double-conjugate maintaining optical system | Satoru Anzai, Kyoichi Suwa | 1986-06-03 |
| 4573499 | Weft detection stopper for looms | Katsuhiko Sugita | 1986-03-04 |
| 4564269 | Projection lens | — | 1986-01-14 |
| 4558949 | Horizontal position detecting device | Takeshi Sudo, Fujio Kanatani | 1985-12-17 |
| 4498762 | Projection type exposure apparatus | Satoru Anzai | 1985-02-12 |
| 4498742 | Illumination optical arrangement | — | 1985-02-12 |
| 4249793 | Erect type zoom telescopic optical system | — | 1981-02-10 |