Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6136682 | Method for forming a conductive structure having a composite or amorphous barrier layer | Rama I. Hegde, Dean J. Denning, Philip J. Tobin | 2000-10-24 |
| 6027997 | Method for chemical mechanical polishing a semiconductor device using slurry | Chris C. Yu, Jeffrey Hanson | 2000-02-22 |
| 5702981 | Method for forming a via in a semiconductor device | Papu D. Maniar, Roc Blumenthal, Wei-Jen Wu | 1997-12-30 |
| 5578523 | Method for forming inlaid interconnects in a semiconductor device | Robert W. Fiordalice, Papu D. Maniar | 1996-11-26 |
| 5534462 | Method for forming a plug and semiconductor device having the same | Robert W. Fiordalice, Papu D. Maniar, Bernard J. Roman | 1996-07-09 |
| 5527739 | Process for fabricating a semiconductor device having an improved metal interconnect structure | Louis C. Parrillo | 1996-06-18 |
| 5442235 | Semiconductor device having an improved metal interconnect structure | Louis C. Parrillo | 1995-08-15 |
| 5399234 | Acoustically regulated polishing process | Chris C. Yu, Tat-Kwan Yu | 1995-03-21 |
| 4978626 | LDD transistor process having doping sensitive endpoint etching | Stephen S. Poon, James R. Pfiester, Frank K. Baker, Jr. | 1990-12-18 |
| 4917759 | Method for forming self-aligned vias in multi-level metal integrated circuits | Duncan M. Fisher | 1990-04-17 |
| 4829024 | Method of forming layered polysilicon filled contact by doping sensitive endpoint etching | Stephen S. Poon, Mark S. Swenson, Sudhir K. Madan | 1989-05-09 |