Issued Patents All Time
Showing 101–125 of 143 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7252715 | System for dispensing liquids | Michael Watts, Byung-Jin Choi | 2007-08-07 |
| 7244386 | Method of compensating for a volumetric shrinkage of a material disposed upon a substrate to form a substantially planar structure therefrom | Frank Y. Xu | 2007-07-17 |
| 7245358 | Substrate support system | Pawan Kumar Nimmakayala | 2007-07-17 |
| 7241395 | Reverse tone patterning on surfaces having planarity perturbations | Nicholas A. Stacey | 2007-07-10 |
| 7229273 | Imprint lithography template having a feature size under 250 nm | Todd C. Bailey, Byung-Jin Choi, Matthew E. Colburn, Carlton G. Willson, John Ekerdt | 2007-06-12 |
| 7224443 | Imprint lithography substrate processing tool for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Michael Watts, Daniel Babbs, Mario Johannes Meissl +2 more | 2007-05-29 |
| 7205244 | Patterning substrates employing multi-film layers defining etch-differential interfaces | Nicholas A. Stacey, Michael Nevin Miller | 2007-04-17 |
| 7186656 | Method of forming a recessed structure employing a reverse tone process | — | 2007-03-06 |
| 7186483 | Method of determining alignment of a template and a substrate having a liquid disposed therebetween | Byung-Jin Choi, Matthew E. Colburn, Todd C. Bailey | 2007-03-06 |
| 7179396 | Positive tone bi-layer imprint lithography method | — | 2007-02-20 |
| 7179079 | Conforming template for patterning liquids disposed on substrates | Byung-Jin Choi, Ronald D. Voisin | 2007-02-20 |
| 7170589 | Apparatus to vary dimensions of a substrate during nano-scale manufacturing | Anshuman Cherala, Byung-Jin Choi, Pawan Kumar Nimmakayala, Mario Johannes Meissl | 2007-01-30 |
| 7150622 | Systems for magnification and distortion correction for imprint lithography processes | Byung-Jin Choi, Mario Johannes Meissl | 2006-12-19 |
| 7140861 | Compliant hard template for UV imprinting | Michael Watts, Ronald D. Voisin | 2006-11-28 |
| 7136150 | Imprint lithography template having opaque alignment marks | Philip D. Schumaker | 2006-11-14 |
| 7105452 | Method of planarizing a semiconductor substrate with an etching chemistry | — | 2006-09-12 |
| 7098572 | Apparatus to control displacement of a body spaced-apart from a surface | Byung-Jin Choi, Stephen C. Johnson | 2006-08-29 |
| 7077992 | Step and repeat imprint lithography processes | Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael Watts, Mario Johannes Meissl | 2006-07-18 |
| 7070405 | Alignment systems for imprint lithography | Michael Watts, Byung-Jin Choi, Ronald D. Voisin, Norman E. Schumaker | 2006-07-04 |
| 7071088 | Method for fabricating bulbous-shaped vias | Michael Watts | 2006-07-04 |
| 7060324 | Method of creating a dispersion of a liquid on a substrate | Todd C. Bailey, Byung-Jin Choi, Matthew E. Colburn, C. Grant Willson, John Ekerdt | 2006-06-13 |
| 7060402 | Method of orientating a template with respect to a substrate in response to a force exerted on the template | Byung-Jin Choi, Stephen C. Johnson | 2006-06-13 |
| 7036389 | System for determining characteristics of substrates employing fluid geometries | Byung-Jin Choi | 2006-05-02 |
| 7019835 | Method and system to measure characteristics of a film disposed on a substrate | Ian McMackin, Phillip D. Schumaker, Byung-Jin Choi, Michael Watts | 2006-03-28 |
| 7019819 | Chucking system for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Michael Watts, Daniel Babbs, Mario Johannes Meissl +2 more | 2006-03-28 |