Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7467901 | Substrate heat treatment apparatus | — | 2008-12-23 |
| 7460923 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Hidekazu Inoue, Tetsuya Hamada | 2008-12-02 |
| 7364376 | Substrate processing apparatus | Kenji Sugimoto | 2008-04-29 |
| 7333867 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Hidekazu Inoue, Tetsuya Hamada | 2008-02-19 |
| 7280883 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Hidekazu Inoue, Tetsuya Hamada | 2007-10-09 |
| 7259947 | Phase control switching device | Sadayuki Kinoshita, Hiroki Ito, Haruhiko Kohyama | 2007-08-21 |
| 7088423 | Edge exposing apparatus | Kazuya Akiyama, Kazuya Ono | 2006-08-08 |
| 7047100 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Hidekazu Inoue, Tetsuya Hamada | 2006-05-16 |
| 6963789 | Substrate processing apparatus control system and substrate processing apparatus | Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Noriaki Yokono, Kenji Sugimoto +1 more | 2005-11-08 |
| 6869190 | Projection display device | Tooru Goto, Masahiro Muramatsu, Morio Ando | 2005-03-22 |
| 6837632 | Substrate treating apparatus | Yasufumi Koyama, Toru Kitamoto, Kenji Hashinoki, Satoshi Yamamoto, Toshiaki Dainin | 2005-01-04 |
| 6661692 | Semiconductor integrated circuit | Shinsuke Anzai, Yasumichi Mori | 2003-12-09 |
| 6060697 | Substrate processing apparatus having regulated power consumption and method therefor | Akihiko Morita, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami +4 more | 2000-05-09 |
| 5982474 | Periphery exposing apparatus and method | Kazuya Akiyama, Satoshi Yamamoto | 1999-11-09 |
| 5837953 | DC circuit breaking device | Hiroki Ito, Takashi Moriyama, Minoru Kimura, Suenobu Hamano, Takashi Yonezawa +6 more | 1998-11-17 |
| 5737162 | Circuit breaking device | Hiroki Ito, Takashi Moriyama, Suenobu Hamano, Etsuo Nitta, Kazuhiko Arai +3 more | 1998-04-07 |
| 5687085 | Substrate processing apparatus and method | Toru Morimoto, Kenji Hashinoki, Tetsuya Hamada | 1997-11-11 |
| 5668733 | Substrate processing apparatus and method | Toru Morimoto, Kenji Hashinoki, Tetsuya Hamada | 1997-09-16 |
| 5668691 | Arrangement for gas circuit breaker with reactor and capacitor connected in series and method for setting its circuit parameter | Hiroki Ito, Takashi Moriyama, Suenobu Hamano, Etsuo Nitta, Naoaki Takeji +2 more | 1997-09-16 |
| 5523657 | Convergence correction apparatus for picture image display device | — | 1996-06-04 |
| 5438209 | Apparatus for detecting position of a notch in a semiconductor wafer | Satoshi Yamamoto | 1995-08-01 |
| 5289263 | Apparatus for exposing periphery of an object | Shinji Kiyokawa, Nobutoshi Orgami, Takeshi Takada | 1994-02-22 |
| 5238659 | Moving granular bed dust removal and reaction apparatus | Hironori Tajiri | 1993-08-24 |
| 5160708 | Dry type simultaneous desulfurization and dedusting apparatus and method of operation therefor | Kenzaburo Kodama, Kousuke Yoshida, Katsuya Ishikawa, Yukio Kubo, Yoshiaki Takatani | 1992-11-03 |
| 5102636 | Method of operation of a dry type simultaneous desulfurization and dedusting apparatus | Kenzaburo Kodama, Kousuke Yoshida, Katsuya Ishikawa, Yukio Kubo | 1992-04-07 |