Issued Patents All Time
Showing 51–75 of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7112121 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Whonchee Lee, Scott Meikle, Trung T. Doan | 2006-09-26 |
| 7094131 | Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material | Whonchee Lee, Scott Meikle | 2006-08-22 |
| 7074113 | Methods and apparatus for removing conductive material from a microelectronic substrate | — | 2006-07-11 |
| 7070659 | System for filling openings in semiconductor products | — | 2006-07-04 |
| 7063595 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2006-06-20 |
| 7063603 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2006-06-20 |
| 7060608 | System and method for filling openings in semiconductor products | — | 2006-06-13 |
| 7053775 | RFID material tracking method and apparatus | — | 2006-05-30 |
| 7042358 | RFID material tracking method and apparatus | — | 2006-05-09 |
| 7001845 | Methods of treating surfaces of substrates | Trung T. Doan | 2006-02-21 |
| 7001251 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2006-02-21 |
| 6997789 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2006-02-14 |
| 6969297 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2005-11-29 |
| 6956538 | RFID material tracking method and apparatus | — | 2005-10-18 |
| 6949011 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2005-09-27 |
| 6945855 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2005-09-20 |
| 6922253 | Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates | — | 2005-07-26 |
| 6921318 | Semiconductor die de-processing using a die holder and chemical mechanical polishing | Bryan Carson | 2005-07-26 |
| 6913519 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2005-07-05 |
| 6858538 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2005-02-22 |
| 6840840 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2005-01-11 |
| 6830666 | Electroplating apparatus and method | — | 2004-12-14 |
| 6827630 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2004-12-07 |
| 6817928 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2004-11-16 |
| 6793558 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2004-09-21 |