Issued Patents All Time
Showing 26–50 of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588677 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Whonchee Lee, Scott Meikle, Trung T. Doan | 2009-09-15 |
| 7568579 | High stability package for dental treatment devices | — | 2009-08-04 |
| 7560017 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium | Whonchee Lee, Scott Meikle | 2009-07-14 |
| 7538880 | Turbidity monitoring methods, apparatuses, and sensors | Scott Meikle, Magdel Crum | 2009-05-26 |
| 7530877 | Semiconductor processor systems, a system configured to provide a semiconductor workpiece process fluid | Scott Meikle, Magdel Crum | 2009-05-12 |
| 7524410 | Methods and apparatus for removing conductive material from a microelectronic substrate | Whonchee Lee, Brian A. Vaartstra | 2009-04-28 |
| 7438632 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2008-10-21 |
| 7383152 | Non-contact deviation measurement system | Brett Olin | 2008-06-03 |
| 7294040 | Method and apparatus for supporting a microelectronic substrate relative to a planarization pad | — | 2007-11-13 |
| 7278905 | Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operation | Dinesh Chopra | 2007-10-09 |
| 7273411 | Polishing apparatus | Dinesh Chopra | 2007-09-25 |
| 7261832 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2007-08-28 |
| 7229336 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2007-06-12 |
| 7220166 | Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott Meikle | 2007-05-22 |
| 7180591 | Semiconductor processors, sensors, semiconductor processing systems, semiconductor workpiece processing methods, and turbidity monitoring methods | Scott Meikle, Magdel Crum | 2007-02-20 |
| 7172491 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2007-02-06 |
| 7160176 | Methods and apparatus for electrically and/or chemically-mechanically removing conductive material from a microelectronic substrate | Whonchee Lee, Scott Meikle | 2007-01-09 |
| 7153195 | Methods and apparatus for selectively removing conductive material from a microelectronic substrate | Whonchee Lee, Scott Meikle | 2006-12-26 |
| 7153410 | Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces | Whonchee Lee, Scott Meikle, Trung T. Doan | 2006-12-26 |
| 7144304 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2006-12-05 |
| 7134934 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium | Whonchee Lee, Scott Meikle | 2006-11-14 |
| 7118447 | Semiconductor workpiece processing methods | Scott Meikle, Magdel Crum | 2006-10-10 |
| 7118455 | Semiconductor workpiece processing methods | Scott Meikle, Magdel Crum | 2006-10-10 |
| 7118445 | Semiconductor workpiece processing methods, a method of preparing semiconductor workpiece process fluid, and a method of delivering semiconductor workpiece process fluid to a semiconductor processor | Scott Meikle, Magdel Crum | 2006-10-10 |
| 7112121 | Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate | Whonchee Lee, Scott Meikle, Trung T. Doan | 2006-09-26 |