Issued Patents All Time
Showing 76–100 of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6786805 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2004-09-07 |
| 6786799 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2004-09-07 |
| 6780095 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2004-08-24 |
| 6780082 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2004-08-24 |
| 6773332 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2004-08-10 |
| 6755718 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2004-06-29 |
| 6749489 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2004-06-15 |
| 6739952 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2004-05-25 |
| 6736698 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2004-05-18 |
| 6733363 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2004-05-11 |
| 6734121 | Methods of treating surfaces of substrates | Trung T. Doan | 2004-05-11 |
| 6722957 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2004-04-20 |
| 6720266 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2004-04-13 |
| 6714121 | RFID material tracking method and apparatus | — | 2004-03-30 |
| 6706139 | Method and apparatus for cleaning a web-based chemical mechanical planarization system | Dinesh Chopra | 2004-03-16 |
| 6702647 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2004-03-09 |
| 6699791 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2004-03-02 |
| 6672949 | Polishing apparatus | Dinesh Chopra | 2004-01-06 |
| 6663470 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-12-16 |
| 6652370 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-11-25 |
| 6642140 | System for filling openings in semiconductor products | — | 2003-11-04 |
| 6626734 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-09-30 |
| 6623329 | Method and apparatus for supporting a microelectronic substrate relative to a planarization pad | — | 2003-09-23 |
| 6612328 | In-line valve | — | 2003-09-02 |
| 6613105 | System for filling openings in semiconductor products | — | 2003-09-02 |