Issued Patents All Time
Showing 126–150 of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419572 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-07-16 |
| 6416402 | Methods of polishing microelectronic substrates, and methods of polishing wafers | — | 2002-07-09 |
| 6402601 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2002-06-11 |
| 6394883 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2002-05-28 |
| 6390910 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-05-21 |
| 6368193 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2002-04-09 |
| 6364746 | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic-substrate assemblies | — | 2002-04-02 |
| 6364757 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-04-02 |
| 6361411 | Method for conditioning polishing surface | Dinesh Chopra | 2002-03-26 |
| 6358127 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2002-03-19 |
| 6354930 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2002-03-12 |
| 6352466 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2002-03-05 |
| 6344126 | Electroplating apparatus and method | — | 2002-02-05 |
| 6312558 | Method and apparatus for planarization of a substrate | — | 2001-11-06 |
| 6306008 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2001-10-23 |
| 6306014 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2001-10-23 |
| 6290576 | Semiconductor processors, sensors, and semiconductor processing systems | Scott Meikle, Magdel Crum | 2001-09-18 |
| 6273796 | Method and apparatus for planarizing a microelectronic substrate with a tilted planarizing surface | — | 2001-08-14 |
| 6261163 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2001-07-17 |
| 6248001 | Semiconductor die de-processing using a die holder and chemical mechanical polishing | Bryan Carson | 2001-06-19 |
| 6234878 | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | — | 2001-05-22 |
| 6217727 | Electroplating apparatus and method | — | 2001-04-17 |
| 6213144 | In-line valve | — | 2001-04-10 |
| 6206754 | Endpoint detection apparatus, planarizing machines with endpointing apparatus, and endpointing methods for mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | — | 2001-03-27 |
| 6196899 | Polishing apparatus | Dinesh Chopra | 2001-03-06 |