Issued Patents All Time
Showing 101–125 of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612900 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-09-02 |
| 6609947 | Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of micro electronic substrates | — | 2003-08-26 |
| 6602380 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-08-05 |
| 6585575 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-07-01 |
| 6572440 | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization | — | 2003-06-03 |
| 6559054 | Methods of treating surfaces of substrates | Trung T. Doan | 2003-05-06 |
| 6547639 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-04-15 |
| 6544109 | Slurry delivery and planarization systems | — | 2003-04-08 |
| 6540588 | Method and apparatus for wireless transfer of chemical-mechanical planarization measurements | — | 2003-04-01 |
| 6537915 | Methods of treating surfaces of substrates | Trung T. Doan | 2003-03-25 |
| 6537190 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-03-25 |
| 6531401 | Method of cleaning a substrate surface using a frozen material | Trung T. Doan | 2003-03-11 |
| 6514130 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-02-04 |
| 6514125 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-02-04 |
| 6506101 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2003-01-14 |
| 6492273 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-12-10 |
| 6482077 | Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine | Trung T. Doan | 2002-11-19 |
| 6472325 | Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-29 |
| 6468912 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-22 |
| 6461964 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies | Jim Hofmann, Gundu M. Sabde, Stephen J. Kramer | 2002-10-08 |
| 6453932 | In-line valve | — | 2002-09-24 |
| 6447369 | Planarizing machines and alignment systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates | — | 2002-09-10 |
| 6428404 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2002-08-06 |
| 6425802 | Apparatus for supplying flush fluid | Daniel G. Custer | 2002-07-30 |
| 6419560 | Web-format planarizing machines and methods for planarizing microelectronic substrate assemblies | Michael A. Walker | 2002-07-16 |