Issued Patents All Time
Showing 151–164 of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6193588 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott A. Southwick | 2001-02-27 |
| 6187681 | Method and apparatus for planarization of a substrate | — | 2001-02-13 |
| 6152808 | Microelectronic substrate polishing systems, semiconductor wafer polishing systems, methods of polishing microelectronic substrates, and methods of polishing wafers | — | 2000-11-28 |
| 6146246 | Method for supplying flush fluid | Daniel G. Custer | 2000-11-14 |
| 6139402 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2000-10-31 |
| 6102782 | System and apparatus for distributing flush fluid to processing equipment | Daniel G. Custer | 2000-08-15 |
| 5954912 | Rotary coupling | — | 1999-09-21 |
| 5833519 | Method and apparatus for mechanical polishing | — | 1998-11-10 |
| 5747386 | Rotary coupling | — | 1998-05-05 |
| 5261776 | Vacuum operated wafer transfer apparatus | Ross H. Burck, Ernest E. Marks | 1993-11-16 |
| 5100287 | Method of transferring wafers using vacuum | Ross H. Burck, Ernest E. Marks | 1992-03-31 |
| 4915597 | Filter pump head assembly improvements | — | 1990-04-10 |
| 4881487 | Fluid level sensing method and apparatus | — | 1989-11-21 |
| 4872356 | Resistivity probe fixture | Jay D. Barnett, Bryan Ludwig, Ernest E. Marks | 1989-10-10 |