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Method of processing a substrate in a lithography system |
Vincent Sylvester Kuiper, Erwin Slot, Marcel Nicolaas Jacobus van Kervinck, Hendrik Jan De Jong |
2015-01-20 |
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Vibration isolation module and substrate processing system |
Jerry Johannes Martinus Peijster, Rogier Martin Lambert Ellenbroek |
2014-12-09 |
| 8895943 |
Lithography system and method of processing substrates in such a lithography system |
Hendrik Jan De Jong, Vincent Sylvester Kuiper, Erwin Slot |
2014-11-25 |
| 8841920 |
Capacitive sensing system |
Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink |
2014-09-23 |
| 8796644 |
Charged particle beam lithography system and target positioning device |
Jerry Johannes Martinus Peijster |
2014-08-05 |
| 8779392 |
Charged particle beam lithography system and target positioning device |
Jerry Johannes Martinus Peijster |
2014-07-15 |
| 8705010 |
Lithography system, method of clamping and wafer table |
Michel Pieter Dansberg, Pieter Kruit |
2014-04-22 |
| 8690005 |
Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber |
Sander Baltussen, Tijs Frans Teepen, Hugo Martijn Makkink |
2014-04-08 |
| 8638109 |
Capacitive sensing system with differential pairs |
Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink |
2014-01-28 |
| 8570055 |
Capacitive sensing system |
Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink |
2013-10-29 |
| 8513959 |
Integrated sensor system |
Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink |
2013-08-20 |
| 8242467 |
Lithography system and projection method |
Remco Jager, Aukje Arianne Annette Kastelijn, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink |
2012-08-14 |
| 7709815 |
Lithography system and projection method |
Remco Jager, Aukje Arianne Annette Kastelijn, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink |
2010-05-04 |