| RE45552 |
Lithography system and projection method |
Pieter Kruit, Stijn Willem Herman Karel Steenbrink, Marco Jan-Jaco Wieland |
2015-06-09 |
| 8921758 |
Modulation device and charged particle multi-beamlet lithography system using the same |
Marco Jan-Jaco Wieland, Teunis Van De Peut, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink, Ralph Van Melle +1 more |
2014-12-30 |
| 8841636 |
Modulation device and charged particle multi-beamlet lithography system using the same |
Marco Jan-Jaco Wieland, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink |
2014-09-23 |
| 8759787 |
Charged particle multi-beamlet lithography system with modulation device |
Marco Jan-Jaco Wieland, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink |
2014-06-24 |
| 8604411 |
Charged particle beam modulator |
Marco Jan-Jaco Wieland, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink, Teunis Van De Peut, Henk Derks |
2013-12-10 |
| 8525134 |
Lithography system |
Jan-Jaco Marco Wieland, Johannes Christiaan van 't Spijker, Pieter Kruit |
2013-09-03 |
| 8492731 |
Charged particle multi-beamlet lithography system with modulation device |
Marco Jan-Jaco Wieland, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink |
2013-07-23 |
| 8242467 |
Lithography system and projection method |
Aukje Arianne Annette Kastelijn, Guido De Boer, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink |
2012-08-14 |
| 8242470 |
Optical switching in a lithography system |
Marco Jan-Jaco Wieland, Johannes Christiaan van 't Spijker, Pieter Kruit |
2012-08-14 |
| 7842936 |
Lithography system and projection method |
Pieter Kruit, Stijn Willem Herman Karel Steenbrink, Marco Jan-Jaco Wieland |
2010-11-30 |
| 7709815 |
Lithography system and projection method |
Aukje Arianne Annette Kastelijn, Guido De Boer, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink |
2010-05-04 |
| 7612866 |
Lithography system |
Jan-Jaco Marco Wieland, Johannes van't Spijker, Pieter Kruit |
2009-11-03 |
| 7173263 |
Optical switching in lithography system |
Jan-Jaco Marco Wieland, Johannes Christiaan van 't Spijker, Pieter Kruit |
2007-02-06 |
| 6958804 |
Lithography system |
Jan-Jaco Marco Wieland, Johannes Christiaan van 't Spijker, Pieter Kruit |
2005-10-25 |