| RE48287 |
Method for forming an optical fiber array |
Guido De Boer, Ralph Van Melle, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks +1 more |
2020-10-27 |
| 10692696 |
Deflection scan speed adjustment during charged particle exposure |
Marco Jan-Jaco Wieland |
2020-06-23 |
| 10297420 |
Charged particle lithography system |
Marco Jan-Jaco Wieland |
2019-05-21 |
| 9978562 |
Method for exposing a wafer |
Marco Jan-Jaco Wieland |
2018-05-22 |
| 9691589 |
Dual pass scanning |
Marco Jan-Jaco Wieland |
2017-06-27 |
| 9457549 |
Method for forming an optical fiber array |
Guido De Boer, Ralph Van Melle, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks +1 more |
2016-10-04 |
| 9455122 |
Modulation device and power supply arrangement |
Hendrik Den Boer |
2016-09-27 |
| 9305747 |
Data path for lithography apparatus |
Marco Jan-Jaco Wieland, Floris Pepijn van der Wilt, Ernst Habekotte |
2016-04-05 |
| 9287081 |
Lithography system, modulation device and method of manufacturing a fiber fixation substrate |
Ralph Van Melle, Henk Derks |
2016-03-15 |
| 9036962 |
Arrangement of optical fibers, and a method of forming such arrangement |
Guido De Boer, Ralph Van Melle, Henk Derks, Frederik Matthias Spiegelhalder, Roy Josephus Stephanus Derks +1 more |
2015-05-19 |
| 8921758 |
Modulation device and charged particle multi-beamlet lithography system using the same |
Marco Jan-Jaco Wieland, Alexander Hendrik Vincent Van Veen, Remco Jager, Stijn Willem Herman Karel Steenbrink, Ralph Van Melle +1 more |
2014-12-30 |
| 8884255 |
Data path for lithography apparatus |
Henk Derks, Marco Jan-Jaco Wieland |
2014-11-11 |
| 8710465 |
Pattern data conversion for lithography system |
Marco Jan-Jaco Weiland |
2014-04-29 |
| 8604411 |
Charged particle beam modulator |
Marco Jan-Jaco Wieland, Remco Jager, Alexander Hendrik Vincent Van Veen, Stijn Willem Herman Karel Steenbrink, Henk Derks |
2013-12-10 |
| 8598544 |
Method of generating a two-level pattern for lithographic processing and pattern generator using the same |
Marco Jan-Jaco Wieland |
2013-12-03 |