Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672590 | Frequency tuning for a matchless plasma source | Maolin Long, Yuhou Wang, Alex Paterson | 2020-06-02 |
| 10580618 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Alex Paterson | 2020-03-03 |
| 10573494 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Alex Paterson | 2020-02-25 |
| 10431434 | Powered grid for plasma chamber | Maolin Long, Alex Paterson, Richard A. Marsh | 2019-10-01 |
| 10395894 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Alex Paterson | 2019-08-27 |
| 10340915 | Frequency and match tuning in one state and frequency tuning in the other state | — | 2019-07-02 |
| 10304660 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Alex Paterson | 2019-05-28 |
| 10242845 | Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber | Zhongkui Tan, Yiting Zhang, Qian Fu, Qing Xu, Saravanapriyan Sriraman +1 more | 2019-03-26 |
| 10224183 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Alex Paterson | 2019-03-05 |
| 10177003 | Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level | Zhongkui Tan, Qian Fu, Qing Xu, Hua Xiang | 2019-01-08 |
| 10009028 | Frequency and match tuning in one state and frequency tuning in the other state | — | 2018-06-26 |
| 9991128 | Atomic layer etching in continuous plasma | Zhongkui Tan, Yiting Zhang, Qing Xu, Qian Fu, Yoko Yamaguchi +1 more | 2018-06-05 |
| 9966236 | Powered grid for plasma chamber | Maolin Long, Alex Paterson, Richard A. Marsh | 2018-05-08 |
| 9824896 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Qing Xu, John Drewery | 2017-11-21 |
| 9805963 | Electrostatic chuck with thermal choke | Maolin Long, Alex Paterson, Quan Chau | 2017-10-31 |
| 9767991 | Methods and systems for independent control of radical density, ion density, and ion energy in pulsed plasma semiconductor device fabrication | Zhongkui Tan, Qian Fu, Qing Xu | 2017-09-19 |
| 9761459 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Qian Fu, Alex Paterson, John Drewery | 2017-09-12 |
| 9691625 | Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level | Zhongkui Tan, Qian Fu, Qing Xu | 2017-06-27 |
| 9583357 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Qian Fu, Alex Paterson, John Drewery | 2017-02-28 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Maolin Long, Alex Paterson, Ricky Marsh, John Drewery | 2016-03-22 |
| 8306184 | X-ray pixel beam array systems and methods for electronically shaping radiation fields and modulation radiation field intensity patterns for radiotherapy | Sha Chang | 2012-11-06 |