Issued Patents All Time
Showing 76–92 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8456641 | Optical system | Noah Bareket, Michael Adel | 2013-06-04 |
| 8441639 | Metrology systems and methods | Daniel Kandel, Alexander Svizher, Joel Seligson, Andrew V. Hill, Ohad Bachar +6 more | 2013-05-14 |
| 8390808 | Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods | Michael Adel, Mark Ghinovker, Alexander Svizher | 2013-03-05 |
| 8345243 | Overlay metrology target | Mark Ghinovker | 2013-01-01 |
| 8243273 | Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods | Michael Adel, Mark Ghinovker, Alexander Svizher | 2012-08-14 |
| 8004679 | Target design and methods for scatterometry overlay determination | Daniel Kandel | 2011-08-23 |
| 7724375 | Method and apparatus for increasing metrology or inspection tool throughput | Alex Novikov, Royi Levav, Yaron Zimmerman, Joel Seligson | 2010-05-25 |
| 7684038 | Overlay metrology target | Mark Ghinovker | 2010-03-23 |
| 7671990 | Cross hatched metrology marks and associated method of use | Michael Adel, Elyakim Kassel | 2010-03-02 |
| 7602491 | Optical gain approach for enhancement of overlay and alignment systems performance | Daniel Kandel, Michael Adel, Joel Seligson | 2009-10-13 |
| 7528941 | Order selected overlay metrology | Daniel Kandel, Michael Adel, Joel Seligson | 2009-05-05 |
| 7528953 | Target acquisition and overlay metrology based on two diffracted orders imaging | Aviv Frommer, Mark D. Smith, Jeffrey Byers, Chris Mack, Michael Adel | 2009-05-05 |
| 7526749 | Methods and apparatus for designing and using micro-targets in overlay metrology | Michael Adel, Aviv Frommer, Daniel Kandel | 2009-04-28 |
| 7433039 | Apparatus and methods for reducing tool-induced shift during overlay metrology | Ilan Sela | 2008-10-07 |
| 7352451 | System method and structure for determining focus accuracy | Michael Adel | 2008-04-01 |
| 7310789 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel +2 more | 2007-12-18 |
| 7111256 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel +2 more | 2006-09-19 |