Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928739 | Method of measuring misregistration of semiconductor devices | Ido Dolev | 2021-02-23 |
| 10763146 | Recipe optimization based zonal analysis | Michael Adel, Liran Yerushalmi, Eitan Herzel, Mengmeng Ye, Eran Amit | 2020-09-01 |
| 10754260 | Method and system for process control with flexible sampling | Onur N. Demirer, William Pierson, Mark Wagner, Dana Klein | 2020-08-25 |
| 10458777 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Andrew V. Hill, Amnon Manassen, Nuriel Amir +1 more | 2019-10-29 |
| 10401841 | Identifying registration errors of DSA lines | Eran Amit, Raviv Yohanan | 2019-09-03 |
| 10340196 | Method and system for selection of metrology targets for use in focus and dose applications | Hiroyuki Kurita, Yoel Feler | 2019-07-02 |
| 10331050 | Lithography systems with integrated metrology tools having enhanced functionalities | Eran Amit, Liran Yerushalmi | 2019-06-25 |
| 10303835 | Method and apparatus for direct self assembly in target design and production | Eran Amit, Raviv Yohanan, Tal Itzkovich, Nuriel Amir, DongSub Choi | 2019-05-28 |
| 10025285 | On-product derivation and adjustment of exposure parameters in a directed self-assembly process | Eran Amit, Nuriel Amir, Michael Adel | 2018-07-17 |
| 9934353 | Focus measurements using scatterometry metrology | Mohamed El Kodadi, Nuriel Amir, Vladimir Levinski, Yoel Feler, Daniel Kandel +3 more | 2018-04-03 |