Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6326658 | Semiconductor device including an interface layer containing chlorine | Katsuya Okumura, Masayuki Tanaka, Shigehiko Saida, Hirofumi Inoue, Takeshi Hamamoto | 2001-12-04 |
| 6313047 | MOCVD method of tantalum oxide film | Kazuhide Hasebe, Yuichiro Morozumi, Dong-Kyun Choi, Takuya Sugawara, Seiji Inumiya | 2001-11-06 |
| 6284583 | Semiconductor device and method of manufacturing the same | Shigehiko Saida | 2001-09-04 |
| 6278164 | Semiconductor device with gate insulator formed of high dielectric film | Katsuhiko Hieda, Keitaro Imai, Tomonori Aoyama | 2001-08-21 |
| 6232641 | Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor | Kiyotaka Miyano, Ichiro Mizushima, Tomohiro Saito | 2001-05-15 |
| 6184083 | Semiconductor device and method of manufacturing the same | Kiyotaka Miyano, Yukihiro Ushiku | 2001-02-06 |
| 6146938 | Method of fabricating semiconductor device | Shigehiko Saida, Tsutomu Sato | 2000-11-14 |
| 6133121 | Apparatus for supporting semiconductor wafers and semiconductor wafer processing method using supporting apparatus | Katsuya Okumura, Shigeru Yonemoto | 2000-10-17 |
| 6100132 | Method of deforming a trench by a thermal treatment | Tsutomu Sato, Ichiro Mizushima, Junichiro Iba | 2000-08-08 |
| 6093243 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yuuichi Mikata +1 more | 2000-07-25 |
| 6091117 | Field effect transistor having elevated source and drain regions and methods of manufacturing the same | Jun-ichi Shiozawa, Katsuya Okumura | 2000-07-18 |
| 6087719 | Chip for multi-chip semiconductor device and method of manufacturing the same | — | 2000-07-11 |
| 6066872 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yuuichi Mikata +1 more | 2000-05-23 |
| 5970352 | Field effect transistor having elevated source and drain regions and methods for manufacturing the same | Jun-ichi Shiozawa, Katsuya Okumura | 1999-10-19 |
| 5888876 | Deep trench filling method using silicon film deposition and silicon migration | Jun-ichi Shiozawa, Katsuya Okumura | 1999-03-30 |
| 5879447 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yuuichi Mikata +1 more | 1999-03-09 |
| 5849089 | Evaporator for liquid raw material and evaporation method therefor | Katsuya Okumura | 1998-12-15 |
| 5766785 | Method and apparatus for manufacturing a semiconductor device | Yuuichi Mikata, Takashi Nakao | 1998-06-16 |
| 5605574 | Semiconductor wafer support apparatus and method | Katsuya Okumura | 1997-02-25 |
| 5582640 | Semiconductor device and its fabricating method | Takako Okada, Shigeru Kambayashi, Moto Yabuki, Shinji Onga, Yuuichi Mikata +1 more | 1996-12-10 |
| 5485034 | Semiconductor device including bipolar transistor having shallowed base | Takeo Maeda, Hiroshi Gojohbori | 1996-01-16 |
| 5451809 | Smooth surface doped silicon film formation | Jun-ichi Shiozawa | 1995-09-19 |
| 5406115 | Semiconductor device including bipolar transistor having shallowed base and method for manufacturing the same | Takeo Maeda, Hiroshi Gojohbori | 1995-04-11 |
| 5354710 | Method of manufacturing semiconductor devices using an adsorption enhancement layer | Hideichi Kawaguchi, Kikuo Yamabe, Katsuya Okumura | 1994-10-11 |
| 5324686 | Method of manufacturing semiconductor device using hydrogen as a diffusion controlling substance | — | 1994-06-28 |