Issued Patents All Time
Showing 101–118 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5861866 | LSI mask pattern edit apparatus with contour line intensity distribution display method of resolution for lithography | Satoshi Tanaka | 1999-01-19 |
| 5783336 | Mask for exposure | Masami Aoki, Yusuke Kohyama, Akiko Nikki | 1998-07-21 |
| 5745388 | Profile simulation method and pattern design method | Shoji Mimotogi | 1998-04-28 |
| 5733687 | Photomask, exposing method using photomask, and manufacturing method of photomask | Satoshi Tanaka, Shoji Mimotogi, Tadahito Fujisawa | 1998-03-31 |
| 5707501 | Filter manufacturing apparatus | Tadahito Fujisawa, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1998-01-13 |
| 5686209 | Phase shifting mask and method of forming a pattern using the same | Takayuki Iwamatsu, Kenji Kawano, Hideya Miyazaki, Shinichi Ito, Hiroyuki Sato +2 more | 1997-11-11 |
| 5673103 | Exposure apparatus and method | Satoshi Tanaka, Tadahito Fujisawa | 1997-09-30 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1997-06-17 |
| 5633713 | Method and system for evaluating distribution of absorption light amount in optical lithography | Satoshi Tanaka | 1997-05-27 |
| 5627626 | Projectin exposure apparatus | Tadahito Fujisawa, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-05-06 |
| 5621498 | Projection exposure apparatus | Tadahito Fujisawa, Shin Ito, Takashi Sato, Shuichi Tamamushi, Keiji Horioka | 1997-04-15 |
| 5609977 | Reflection phase shifting mask and method of forming a pattern using the same | Takayuki Iwamatsu, Kenji Kawano, Hideya Miyazaki, Shinichi Ito, Hiroyuki Sato +2 more | 1997-03-11 |
| 5549995 | Photomask and method of manufacturing the same | Satoshi Tanaka, Hiroko Nakamura | 1996-08-27 |
| 5514499 | Phase shifting mask comprising a multilayer structure and method of forming a pattern using the same | Takayuki Iwamatsu, Kenji Kawano, Hideya Miyazaki, Shinichi Ito, Hiroyuki Sato +2 more | 1996-05-07 |
| 5429730 | Method of repairing defect of structure | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1995-07-04 |
| 5422205 | Micropattern forming method | Ichiro Mori, Tsuyoshi Shibata | 1995-06-06 |
| 4490320 | Process for preparing a calcium silicate shaped product | Yasuo Oguri, Mitsuru Awata, Junji Saito, Noriyuki Ariyama | 1984-12-25 |
| 4427611 | Process for preparing calcium silicate shaped product | Yasuo Oguri, Mitsuru Awata, Junji Saito, Tatsuo Andio, Mitsunobu Abe | 1984-01-24 |