Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5535508 | Method for producing an electrostatic lens | Takamitsu Nagai, Yuichiro Yamazaki | 1996-07-16 |
| 5498874 | Defect detecting apparatus and method | Katsuya Okumura | 1996-03-12 |
| 5491339 | Charged particle detection device and charged particle radiation apparatus | Tadashi Mitsui, Nozomu Harada, Makoto Sekine, Katsuya Okumura, Haruo Okano | 1996-02-13 |
| 5444256 | Electrostatic lens and method for producing the same | Takamitsu Nagai, Yuichiro Yamazaki | 1995-08-22 |
| 5429730 | Method of repairing defect of structure | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1995-07-04 |
| 5413663 | Plasma processing apparatus | Masahiro Shimizu, Takayuki Fukasawa, Yuichiro Yamazaki, Haruo Okano, Katsuya Okumura | 1995-05-09 |
| 5399860 | Electron optic column and scanning electron microscope | Katsuya Okumura | 1995-03-21 |
| 5371371 | Magnetic immersion field emission electron gun systems capable of reducing aberration of electrostatic lens | Yuichiro Yamazaki, Takamitsu Nagai | 1994-12-06 |
| 5362968 | Optic column having particular major/minor axis magnification ratio | Yuichiro Yamazaki, Katsuya Okumura | 1994-11-08 |
| 5359197 | Apparatus and method of aligning electron beam of scanning electron microscope | Fumio Komatsu | 1994-10-25 |
| 5315119 | Electron beam irradiating apparatus and electric signal detecting apparatus | Fumio Komatsu, Katsuya Okumura | 1994-05-24 |
| 5293045 | Electrostatic lens | Katsuya Okumura, Yuichiro Yamazaki | 1994-03-08 |
| 5138169 | Method and apparatus for irradiating low-energy electrons | Yuichiro Yamazaki, Katsuya Okumura | 1992-08-11 |
| 5030908 | Method of testing semiconductor elements and apparatus for testing the same | Katsuya Okumura | 1991-07-09 |
| 5029250 | Pattern configuration measuring apparatus | Fumio Komatsu | 1991-07-02 |
| 5021702 | Electron beam apparatus including a plurality of ion pump blocks | Katsuya Okumura | 1991-06-04 |
| 4912052 | Method of testing semiconductor elements | Katsuya Okumura | 1990-03-27 |
| 4902131 | Surface inspection method and apparatus therefor | Yuichiro Yamazaki, Shigeru Ogawa, Katsuya Okumura | 1990-02-20 |
| 4890029 | Electron beam apparatus including plurality of ion pump blocks | Katsuya Okumura | 1989-12-26 |
| 4807159 | Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system | Fumio Komatsu, Katsuya Okumura | 1989-02-21 |
| 4800268 | Method and apparatus for scanning a laser beam to examine the surface of semiconductor wafer | Katsuya Okumura, Shigeru Ogawa | 1989-01-24 |
| 4562455 | Semiconductor element | Katsuya Okumura | 1985-12-31 |
| 4538065 | Stroboscopic scanning electron microscope | Tetsuya Sano | 1985-08-27 |