Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7400005 | Semiconductor memory device having ferroelectric capacitors with hydrogen barriers | Yoshinori Kumura, Iwao Kunishima, Hiroyuki Kanaya, Tohru Ozaki | 2008-07-15 |
| 7115522 | Method for manufacturing semiconductor device | Haoren Zhuang | 2006-10-03 |
| 7045837 | Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing | Ulrich Egger, Haoren Zhuang, Yoshinoru Kumura, Hiroyuki Kanaya | 2006-05-16 |
| 7042705 | Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing | Haoren Zhuang, Ulrich Egger, Jingyu Lian, Nicolas Nagel, Andreas Hilliger +1 more | 2006-05-09 |
| 7015049 | Fence-free etching of iridium barrier having a steep taper angle | Ulrich Egger, Haoren Zhuang, George Stojakovic | 2006-03-21 |
| 6780278 | Plasma processing apparatus with reduced parasitic capacity and loss in RF power | Hisataka Hayashi, Itsuko Sakai, Tokuhisa Ohiwa, Akihiro Kojima | 2004-08-24 |
| 6762064 | Process for fabrication of a ferrocapacitor | Haoren Zhuang, Ulrich Egger | 2004-07-13 |
| 5897713 | Plasma generating apparatus | Makoto Sekine | 1999-04-27 |
| 5810963 | Plasma processing apparatus and method | — | 1998-09-22 |
| 5445710 | Method of manufacturing semiconductor device | Masaru Hori, Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo +3 more | 1995-08-29 |
| 5302240 | Method of manufacturing semiconductor device | Masaru Hori, Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo +3 more | 1994-04-12 |