Issued Patents All Time
Showing 51–75 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2002-08-27 |
| 6436849 | Method for manufacturing semiconductor device having low dielectric constant insulating film, wafer processing equipment and wafer storing box used in this method | Masahiko Hasunuma, Hideshi Miyajima, Rempei Nakata | 2002-08-20 |
| 6407453 | Semiconductor device and method of manufacturing the same | Tadayoshi Watanabe, Sachiyo Ito, Takamasa Usui, Masako Morita, Hirokazu Ezawa | 2002-06-18 |
| 6403462 | Method for manufacturing high reliability interconnection having diffusion barrier layer | Masahiko Hasunuma, Shohei Shima, Sachiyo Ito | 2002-06-11 |
| 6403481 | Film formation method | Tetsuo Matsuda | 2002-06-11 |
| 6375823 | Plating method and plating apparatus | Tetsuo Matsuda, Katsuya Okumura | 2002-04-23 |
| 6368951 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima +5 more | 2002-04-09 |
| 6348402 | Method of manufacturing a copper interconnect | Takashi Kawanoue, Tetsuo Matsuda, Tadashi Iijima | 2002-02-19 |
| 6342444 | Method of forming diffusion barrier for copper interconnects | Kazuyuki Higashi, Noriaki Matsunaga, Hiroshi Toyoda, Akihiro Kajita, Tetsuo Matsuda | 2002-01-29 |
| 6306756 | Method for production of semiconductor device | Masahiko Hasunuma, Sachiyo Ito, Keizo Shimamura, Nobuo Hayasaka, Junsei Tsutsumi +3 more | 2001-10-23 |
| 6291891 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima +5 more | 2001-09-18 |
| 6229211 | Semiconductor device and method of manufacturing the same | Takashi Kawanoue, Junichi Wada, Tetsuo Matsuda | 2001-05-08 |
| 6150270 | Method for forming barrier layer for copper metallization | Tetsuo Matsuda, Tadashi Iijima | 2000-11-21 |
| 6110647 | Method of manufacturing semiconductor device | Soichi Inoue, Masahiko Hasunuma, Takamasa Usui, Masami Aoki, Kazuko Yamamoto +1 more | 2000-08-29 |
| 6090701 | Method for production of semiconductor device | Masahiko Hasunuma, Sachiyo Ito, Keizo Shimamura, Nobuo Hayasaka, Junsei Tsutsumi +3 more | 2000-07-18 |
| 6071810 | Method of filling contact holes and wiring grooves of a semiconductor device | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2000-06-06 |
| 6069071 | Method of manufacturing an interconnect by dissolving an intermetallic compound film into a main component of a metal film | Masahiko Hasunuma | 2000-05-30 |
| 6054770 | Electric solid state device and method for manufacturing the device | Hiroshi Toyoda, Jun Wada, Masahiko Hasunuma | 2000-04-25 |
| 6001461 | Electronic parts and manufacturing method thereof | Hiroshi Toyoda, Masahiko Hasunuma, Takashi Kawanoue, Hiroshi Tomita, Akihiro Kajita +3 more | 1999-12-14 |
| 5956210 | Structure and jig for mounting spring arm on corresponding head arm | — | 1999-09-21 |
| 5953634 | Method of manufacturing semiconductor device | Akihiro Kajita | 1999-09-14 |
| 5859746 | Magnetic disk drive and flexible printed board used in such drive | Katsuaki Ishida, Mitsuhisa Sekino, Yoshiaki Nagasawa, Tomoo Sukagawa, Masaharu Sugimoto +4 more | 1999-01-12 |
| 5798887 | Apparatus for absorbing stator vibrations in computer storage apparatus | Mitsuaki Yoshida | 1998-08-25 |
| 5770095 | Polishing agent and polishing method using the same | Yasutaka Sasaki, Nobuo Hayasaka, Hideaki Hirabayashi, Masatoshi Higuchi | 1998-06-23 |
| 5731927 | Spindle assembly for a disk drive using less than a full compliment of disks | — | 1998-03-24 |