Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8247165 | Upper layer film forming composition for liquid immersion and method of forming photoresist pattern | Toru Kimura, Tomohiro Utaka, Hiroaki Nemoto, Atsushi Nakamura, Takashi Chiba +1 more | 2012-08-21 |
| 8124314 | Radiation-sensitive composition | Hiromu MIYATA | 2012-02-28 |
| 8076053 | Upper layer-forming composition and photoresist patterning method | Atsushi Nakamura, Hiroki Nakagawa, Hiromitsu Nakashima, Takayuki Tsuji, Hiroshi Dougauchi +1 more | 2011-12-13 |
| 7951524 | Self-topcoating photoresist for photolithography | Robert David Allen, Phillip Brock, Shiro Kusumoto, Daniel P. Sanders, Mark Steven Slezak +4 more | 2011-05-31 |
| 7691275 | Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing | C. Grant Willson, Frank L. Palmieri, Stephen C. Johnson, Michael Stewart | 2010-04-06 |
| 7638261 | Radiation-sensitive resin composition | Hiroyuki Ishii, Isao Nishimura, Eiichi Kobayashi | 2009-12-29 |
| 7531286 | Radiation-sensitive resin composition | Hiroyuki Ishii, Masafumi Yamamoto, Isao Nishimura | 2009-05-12 |
| 7521169 | Radiation-sensitive resin composition | Hiroyuki Ishii, Isao Nishimura, Eiichi Kobayashi | 2009-04-21 |
| 7452655 | Acrylic copolymer and radiation-sensitive resin composition | Hiroyuki Ishii, Kouichi Fujiwara, Hiroshi Yamaguchi | 2008-11-18 |
| 7217492 | Onium salt compound and radiation-sensitive resin composition | Eiji Yoneda, Yong Wang | 2007-05-15 |
| 7213081 | Dynamic determination of memory mapped input output range granularity for multi-node computer system | Prabhunandan Narasimhamurthy, Sudheer Miryala, Kazunori Masuyama | 2007-05-01 |
| 7202016 | Radiation-sensitive resin composition | Masaaki Miyaji, Tomoki Nagai, Yuji Yada, Jun Numata, Masafumi Yamamoto +3 more | 2007-04-10 |
| 7087356 | 193nm resist with improved post-exposure properties | Mahmoud Khojasteh, Kuang-Jung Chen, Pushkara R. Varanasi, Eiichi Kobayashi | 2006-08-08 |
| 7076576 | Data transfer in multi-node computer system | Prabhunandan B. Narasimharmurthy, Sudheer Miryala, Kazunori Masuyama | 2006-07-11 |
| 6964840 | Radiation-sensitive resin composition | Noboru Yamahara, Masafumi Yamamoto, Toru Kajita, Tsutomu Shimokawa, Hiroshi Ito | 2005-11-15 |
| 6961761 | System and method for partitioning a computer system into domains | Kazunori Masuyama, Patrick Conway, Hitoshi Oi, Jeremy J. Farrell, Sudheer Miryala +1 more | 2005-11-01 |
| 6943826 | Apparatus for debugging imaging devices and method of testing imaging devices | Hiroshi Tatekawa, Katsumi Sakamoto | 2005-09-13 |
| 6933094 | Radiation-sensitive resin composition | Masaaki Miyaji, Tomoki Nagai, Yuji Yada, Jun Numata, Masafumi Yamamoto +3 more | 2005-08-23 |
| 6908722 | Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition | Satoshi Ebata, Eiji Yoneda, Tomoki Nagai, Tatsuya Toneri, Yong Wang +1 more | 2005-06-21 |
| 6838225 | Radiation-sensitive resin composition | Masafumi Yamamoto, Atsuko Kataoka, Toru Kajita | 2005-01-04 |
| 6800414 | Radiation-sensitive resin composition | Noboru Yamahara, Masafumi Yamamoto, Toru Kajita, Tsutomu Shimokawa, Hiroshi Ito | 2004-10-05 |
| 6800419 | Radiation-sensitive resin composition | Akimasa Soyano, Hiroyuki Ishii, Hidemitsu Ishida, Motoyuki Shima | 2004-10-05 |
| 6753124 | Radiation-sensitive resin composition | Katsuji Douki, Toru Kajita, Tsutomu Shimokawa | 2004-06-22 |
| 6677419 | Preparation of copolymers | Phillip Brock, Eiichi Kobayashi, Isao Nishimura, Thomas I. Wallow, Masafumi Yamamoto | 2004-01-13 |
| 6403288 | Resist pattern formation method | Toshiyuki Kai, Eiichi Kobayashi, Takeo Shioya | 2002-06-11 |