Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7087356 | 193nm resist with improved post-exposure properties | Kuang-Jung Chen, Pushkara R. Varanasi, Yukio Nishimura, Eiichi Kobayashi | 2006-08-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7087356 | 193nm resist with improved post-exposure properties | Kuang-Jung Chen, Pushkara R. Varanasi, Yukio Nishimura, Eiichi Kobayashi | 2006-08-08 |