YK

Yukio Kenbo

HI Hitachi: 10 patents #4,206 of 28,497Top 15%
RT Renesas Technology: 4 patents #758 of 3,337Top 25%
Overall (All Time): #355,017 of 4,157,543Top 9%
14
Patents All Time

Issued Patents All Time

Showing 1–14 of 14 patents

Patent #TitleCo-InventorsDate
7604925 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2009-10-20
7598020 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2009-10-06
7277155 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2007-10-02
7012671 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2006-03-14
6806970 Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Takenori Hirose, Minori Noguchi, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama 2004-10-19
6753972 Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Takenori Hirose, Minori Noguchi, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama 2004-06-22
6485891 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2002-11-26
6468817 Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby Shinichi Nakabayashi, Hisahiko Abe, Hirofumi Tsuchiyama, Yoshiteru Katsumura 2002-10-22
6335146 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2002-01-01
6016187 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 2000-01-18
5767949 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 1998-06-16
5526094 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 1996-06-11
5329333 Exposure apparatus and method Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama 1994-07-12
4504045 Wafer transforming device Nobuyuki Akiyama, Mitsuyoshi Koizumi, Asahiro Kuni 1985-03-12