Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043433 | Method of inspecting surface and method of manufacturing semiconductor device | Sung Yoon Ryu, Chung-Sam Jun, Yu-Sin Yang, Gil-woo Song | 2021-06-22 |
| 10593032 | Defect inspection method and defect inspection apparatus | Sung Yoon Ryu, Joon-Seo Song, Yu-Sin Yang, Chung-Sam Jun | 2020-03-17 |
| 10585115 | Scanning probe inspector | Duck Mahn Oh, Sung Yoon Ryu, Young-Hoon Sohn, Chung-Sam Jun | 2020-03-10 |
| 10527556 | Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same | Min Ho Rim, Jung Soo Kim, Young-Hoon Sohn, Yu-Sin Yang, Chung-Sam Jun | 2020-01-07 |
| 10281410 | Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same | Min Ho Rim, Yu-Sin Yang, Chung-Sam Jun | 2019-05-07 |
| 10249544 | Method of inspecting surface and method of manufacturing semiconductor device | Sung Yoon Ryu, Chung-Sam Jun, Yu-Sin Yang, Gil-woo Song | 2019-04-02 |
| 7666069 | Wafer holder and wafer conveyor equipped with the same | Tae Kyoung Kim, Kyoung-Su Shin, Chung-Sam Jun | 2010-02-23 |
| 7428328 | Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same | Chung-Sam Jun, Yu-Sin Yang, Tae Kyoung Kim | 2008-09-23 |
| 7310140 | Method and apparatus for inspecting a wafer surface | Tae-Min Eom, Yu-Sin Yang, Chung-Sam Jun, Joung Soo Kim, Moon-kyung Kim +2 more | 2007-12-18 |
| 7220173 | Wafer holder and wafer conveyor system equipped with the same | Tae Kyoung Kim, Kyoung-Su Shin, Chung-Sam Jun | 2007-05-22 |
| 7186280 | Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method | Tae-Min Eom, Chung-Sam Jun, Yu-Sin Yang | 2007-03-06 |
| 7186577 | Method for monitoring a density profile of impurities | Sun-Yong Choi, Chung-Sam Jun, Kwan-Woo Ryu | 2007-03-06 |