| 12394670 |
Nucleation-free gap fill ALD process |
Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Susmit Singha Roy +1 more |
2025-08-19 |
| 12328872 |
Liner for V-NAND word line stack |
Jacqueline S. Wrench, Yixiong Yang, Wei V. Tang, Srinivas Gandikota, Yongjing Lin +2 more |
2025-06-10 |
| 11646226 |
Method of tuning film properties of metal nitride using plasma |
Wenyi Liu, Wei V. Tang, Srinivas Gandikota, Yixiong Yang, Jianqiu GUO +2 more |
2023-05-09 |
| 11621226 |
Graphene diffusion barrier |
Srinivas Gandikota, Abhijit Basu Mallick, Srinivas D. Nemani |
2023-04-04 |
| 11476267 |
Liner for V-NAND word line stack |
Jacqueline S. Wrench, Yixiong Yang, Wei V. Tang, Srinivas Gandikota, Yongjing Lin +2 more |
2022-10-18 |
| 11289374 |
Nucleation-free gap fill ALD process |
Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Susmit Singha Roy +1 more |
2022-03-29 |
| 11244824 |
Conformal doped amorphous silicon as nucleation layer for metal deposition |
Rui Cheng, Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota |
2022-02-08 |
| 11066743 |
Selective atomic layer deposition of ruthenium |
Yihong Chen, Srinivas Gandikota, Abhijit Basu Mallick |
2021-07-20 |
| 10991586 |
In-situ tungsten deposition without barrier layer |
Wei V. Tang, Jianqiu GUO, Wenyi Liu, Yixiong Yang, Jacqueline S. Wrench +3 more |
2021-04-27 |
| 10930493 |
Linerless continuous amorphous metal films |
Susmit Singha Roy, Srinivas Gandikota |
2021-02-23 |
| 10916505 |
Graphene diffusion barrier |
Srinivas Gandikota, Abhijit Basu Mallick, Srinivas D. Nemani |
2021-02-09 |
| 10851454 |
Metal deposition methods |
Srinivas Gandikota, Abhijit Basu Mallick |
2020-12-01 |
| 10854461 |
Tungsten deposition without barrier layer |
Yihong Chen, Chia Cheng Chin, Srinivas Gandikota, Kelvin Chan |
2020-12-01 |
| 10854511 |
Methods of lowering wordline resistance |
Yihong Chen, Chia Cheng Chin, Xinliang Lu, Srinivas Gandikota, Ziqing Duan +1 more |
2020-12-01 |
| 10636659 |
Selective deposition for simplified process flow of pillar formation |
Yihong Chen, Ziqing Duan, Abhijit Basu Mallick, Srinivas Gandikota |
2020-04-28 |
| 10636669 |
Seam healing using high pressure anneal |
Yihong Chen, Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Shishi Jiang +2 more |
2020-04-28 |
| 10559497 |
Seamless tungsten fill by tungsten oxidation-reduction |
Yihong Chen, Shishi Jiang, Ziqing Duan, Abhijit Basu Mallick, Srinivas Gandikota |
2020-02-11 |
| 10480066 |
Metal deposition methods |
Srinivas Gandikota, Abhijit Basu Mallick |
2019-11-19 |
| 10468263 |
Tungsten deposition without barrier layer |
Yihong Chen, Chia Cheng Chin, Srinivas Gandikota |
2019-11-05 |
| 7736483 |
Method for electroplating metal wire |
Chun-Yau Huang, Cheng-Chung Chen, Cheng-Hung Tsai, Chwan-Gwo Chyau, Fang-Tsun Chu |
2010-06-15 |
| 7264885 |
Enhancement of the wetting of hydrophobic surfaces by aqueous surfactant solutions |
Milton Rosen |
2007-09-04 |
