Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7011710 | Concentration profile on demand gas delivery system (individual divert delivery system) | Won Bae Bang, Yen-Kun Wang | 2006-03-14 |
| 6699530 | Method for constructing a film on a semiconductor wafer | Michal Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Dale R. DuBois +1 more | 2004-03-02 |
| 6176198 | Apparatus and method for depositing low K dielectric materials | Fong Chang, Robert B. Majewski, John Parks, David Wanamaker, Yen-Kun Wang | 2001-01-23 |
| 6155198 | Apparatus for constructing an oxidized film on a semiconductor wafer | Michael Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Dale R. DuBois +1 more | 2000-12-05 |
| 6148761 | Dual channel gas distribution plate | Robert B. Majewski, Yen-Kun Wang | 2000-11-21 |
| 6086676 | Programmable electrical interlock system for a vacuum processing system | Fufa Chen, James Jin-Long Chen | 2000-07-11 |