Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341009 | Variable hardness amorphous carbon mask | Shihsheng Chang, Andrew Metz, Yun Han, Kai-Hung Yu, Eric Chih-Fang Liu | 2025-06-24 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Peter Ventzek, Mitsunori Ohata, Alok Ranjan | 2025-05-13 |
| 12217935 | Plasma processing methods using multiphase multifrequency bias pulses | Shyam Sridhar, Peter Ventzek, Alok Ranjan | 2025-02-04 |
| 12040176 | Technologies for high aspect ratio carbon etching with inserted charge dissipation layer | Shihsheng Chang, Andrew Metz, Yun Han, Minjoon Park | 2024-07-16 |
| 12009211 | Method for highly anisotropic etching of titanium oxide spacer using selective top-deposition | Katie Lutker-Lee, Eric Chih-Fang Liu, Angelique Raley, Stephanie Oyola-Reynoso, Shihsheng Chang | 2024-06-11 |