Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373796 | Method of inspecting wafer using electron beam | Souk Kim, Chung-Sam Jun, Sang-Kil Lee, Kwang Il Shin, Yu-Sin Yang +1 more | 2019-08-06 |
| 10001444 | Surface inspecting method | Kang-Woong Ko, Sung Yoon Ryu, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn +6 more | 2018-06-19 |
| 9934939 | Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof | Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2018-04-03 |
| 9831626 | Broadband light source and optical inspector having the same | Sung Yoon Ryu, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun, Seong Jin YUN | 2017-11-28 |
| 9733178 | Spectral ellipsometry measurement and data analysis device and related systems and methods | Sung Yoon Ryu, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2017-08-15 |
| 9678020 | Apparatus and method for inspection of substrate defect | Joon-Seo Song, Ji-Young Shin, Seong Jin YUN, Yu-Sin Yang, Sang-Kil Lee +1 more | 2017-06-13 |
| 9455206 | Overlay measuring method and system, and method of manufacturing semiconductor device using the same | Seong Jin YUN, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2016-09-27 |
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sung Yoon Ryu, Sang-Kil Lee, Chung-Sam Jun, Ho-Jeong Kwak, Souk Kim +2 more | 2016-08-16 |
| 9261532 | Conductive atomic force microscope and method of operating the same | Hyun-Woo Kim, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung, Hyung-Su Son +5 more | 2016-02-16 |
| 9255694 | Reflector structure of illumination optic system | Won-Don Joo, Yu-Sin Yang, Sue-Jin Cho, Sang Don Jang, Byeong Hwan Jeon | 2016-02-09 |
| 9123503 | Methods of fabricating microelectronic substrate inspection equipment | Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee, Chang-Hoon Choi | 2015-09-01 |
| 8841824 | Broadband light illuminators | Yu-Sin Yang, Sue-Jin Cho, Won-Don Joo, Min Kook Kim, Sang-Kil Lee +1 more | 2014-09-23 |
| 8729468 | Microelectronic substrate inspection equipment using helium ion microscopy | Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee, Chang-Hoon Choi | 2014-05-20 |
| 8034641 | Method for inspection of defects on a substrate | Chung-Sam Jun, Hyung-Su Son, Yu-Sin Yang | 2011-10-11 |
| 7697130 | Apparatus and method for inspecting a surface of a wafer | Yu-Sin Yang, Young-Jee Yoon, Chung-Sam Jun | 2010-04-13 |