Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354833 | Multiple landing energy scanning electron microscopy systems and methods | Weiming Ren, Zhong-Wei Chen | 2025-07-08 |
| 12308205 | Beam current adjustment for charged-particle inspection system | Zhong-Wei Chen | 2025-05-20 |
| 12230013 | Fully automated SEM sampling system for e-beam image enhancement | Wentian ZHOU, Liangjiang YU, Teng Wang, Lingling PU | 2025-02-18 |
| 12191112 | System and method for defect inspection using voltage contrast in a charged particle system | Zhengwei Zhou, Lingling PU | 2025-01-07 |
| 12189307 | Metrology data correction using image quality metric | Fuming Wang, Stefan Hunsche | 2025-01-07 |
| 12080513 | Cross-talk cancellation in multiple charged-particle beam inspection | Lingling PU, Bo Wang, Zhonghua Dong, Yongxin Wang | 2024-09-03 |
| 12040187 | In-die metrology methods and systems for process control | Lingling PU, Zhong-Wei Chen | 2024-07-16 |
| 11880971 | Inspection method and system | Zhao-Li Zhang, Jack Jau | 2024-01-23 |
| 11861818 | Cascade defect inspection | Zhichao Chen | 2024-01-02 |
| 11842420 | Method and apparatus for adaptive alignment | Lingling PU | 2023-12-12 |
| 11791127 | System and method for bare wafer inspection | Joe Wang | 2023-10-17 |
| 11769317 | Fully automated SEM sampling system for e-beam image enhancement | Wentian ZHOU, Liangjiang YU, Teng Wang, Lingling PU | 2023-09-26 |
| 11756187 | Systems and methods of optimal metrology guidance | Lingling PU, Nan Zhao, Wentian ZHOU, Teng Wang, Ming Xu | 2023-09-12 |
| 11756182 | Pattern grouping method based on machine learning | Zhaohui Guo, Ruoyu Zhu, Chuan Li | 2023-09-12 |
| 11720030 | Low dose charged particle metrology system | Fei Wang, Kuo-Shih Liu | 2023-08-08 |
| 11694312 | Image enhancement for multi-layered structure in charged-particle beam inspection | Ruochong FEI, Lingling PU, Wentian ZHOU, Liangjiang YU, Bo Wang | 2023-07-04 |
| 11681279 | Method for enhancing the semiconductor manufacturing yield | — | 2023-06-20 |
| 11650576 | Knowledge recommendation for defect review | Cho H. Teh, Robeter Jian, YI-YING WANG, Shih-Tsung Chen, Jian-Min Liao +5 more | 2023-05-16 |
| 11527405 | In-die metrology methods and systems for process control | Lingling PU, Zhong-Wei Chen | 2022-12-13 |
| 11450122 | Methods and systems for defect inspection and review | — | 2022-09-20 |
| 11430631 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Shih Liu, Xuedong Liu, Jack Jau | 2022-08-30 |
| 11416979 | Defect displaying method | Cho H. Teh, Ju Hao Chien, YI-YING WANG, Shih-Tsung Chen, Jian-Min Liao +5 more | 2022-08-16 |
| 11315237 | EBeam inspection method | — | 2022-04-26 |
| 11308635 | Method and apparatus for adaptive alignment | Lingling PU | 2022-04-19 |
| 11308602 | Cascade defect inspection | Zhichao Chen | 2022-04-19 |