| 12230013 |
Fully automated SEM sampling system for e-beam image enhancement |
Wentian ZHOU, Liangjiang YU, Teng Wang, Wei Fang |
2025-02-18 |
| 12191112 |
System and method for defect inspection using voltage contrast in a charged particle system |
Wei Fang, Zhengwei Zhou |
2025-01-07 |
| 12080513 |
Cross-talk cancellation in multiple charged-particle beam inspection |
Wei Fang, Bo Wang, Zhonghua Dong, Yongxin Wang |
2024-09-03 |
| 12040187 |
In-die metrology methods and systems for process control |
Wei Fang, Zhong-Wei Chen |
2024-07-16 |
| 11842420 |
Method and apparatus for adaptive alignment |
Wei Fang |
2023-12-12 |
| 11769317 |
Fully automated SEM sampling system for e-beam image enhancement |
Wentian ZHOU, Liangjiang YU, Teng Wang, Wei Fang |
2023-09-26 |
| 11756187 |
Systems and methods of optimal metrology guidance |
Wei Fang, Nan Zhao, Wentian ZHOU, Teng Wang, Ming Xu |
2023-09-12 |
| 11694312 |
Image enhancement for multi-layered structure in charged-particle beam inspection |
Wei Fang, Ruochong FEI, Wentian ZHOU, Liangjiang YU, Bo Wang |
2023-07-04 |
| 11527405 |
In-die metrology methods and systems for process control |
Wei Fang, Zhong-Wei Chen |
2022-12-13 |
| 11308635 |
Method and apparatus for adaptive alignment |
Wei Fang |
2022-04-19 |
| 11216938 |
Systems and methods of optimal metrology guidance |
Wei Fang, Nan Zhao, Wentian ZHOU, Teng Wang, Ming Xu |
2022-01-04 |
| 11126089 |
Method for determining corrections to features of a mask |
Wei Fang, Zhichao Chen, Haili Zhang, Pengcheng Zhang |
2021-09-21 |
| 9884888 |
Chemical regeneration method of oxidized coenzyme NAD (P)+ |
Hanjie Ying, Chenjie Zhu, Qing Li, Zhuotao Tan |
2018-02-06 |