Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8325322 | Optical correction device | Markus Hauf, Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Ole Fluegge +7 more | 2012-12-04 |
| 7999916 | Microlithographic projection exposure apparatus | — | 2011-08-16 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Damian Fiolka, Roel De Jonge | 2011-04-19 |
| 7800732 | Projection exposure method and projection exposure apparatus for microlithography | Joerg Zimmermann, Heiko Feldmann, Paul Graeupner, Ulrich Gebhardt | 2010-09-21 |
| 7345740 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Roel De Jonge, Damian Fiolka | 2008-03-18 |
| 7312852 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Damian Fiolka | 2007-12-25 |