Issued Patents All Time
Showing 25 most recent of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394595 | Multi-antenna unit for large area inductively coupled plasma processing apparatus | ShouQian Shao, Chien-Teh Kao, Jianhua Zhou | 2025-08-19 |
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2025-07-15 |
| 12237406 | Plasma treatment on metal-oxide TFT | Soo Young Choi, Beom Soo Park, Yi Cui, Dong-Kil Yim | 2025-02-25 |
| 12076763 | Selective in-situ cleaning of high-k films from processing chamber using reactive gas precursor | Yujia Zhai, Lai ZHAO, Xiangxin Rui, Dong-Kil Yim, Soo Young Choi | 2024-09-03 |
| 11967516 | Substrate support for chucking of mask for deposition processes | Jrjyan Jerry CHEN, Sanjay Yadav, Jun Li, ShouQian Shao, Surendra Kanimihally Setty | 2024-04-23 |
| 11929236 | Methods of tuning to improve plasma stability | ShouQian Shao, Jianhua Zhou | 2024-03-12 |
| 11854771 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2023-12-26 |
| 11770964 | Thin-film encapsulation | Soo Young Choi, Sanjay Yadav | 2023-09-26 |
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2021-08-17 |
| 10991916 | Thin-film encapsulation | Soo Young Choi, Sanjay Yadav | 2021-04-27 |
| 10854737 | Plasma treatment on metal-oxide TFT | Soo Young Choi, Beom Soo Park, Yi Cui, Dong-Kil Yim | 2020-12-01 |
| 10751765 | Remote plasma source cleaning nozzle for cleaning a gas distribution plate | Young Dong LEE, Chien-Teh Kao, Soo Young Choi, Sanjay Yadav | 2020-08-25 |
| 10381454 | Interface engineering for high capacitance capacitor for liquid crystal display | Xuena Zhang, Dong-Kil Yim, Wenqing Dai, Harvey YOU, Hsiao-Lin Yang +2 more | 2019-08-13 |
| 10312475 | CVD thin film stress control method for display application | Soo Young Choi, Sanjay Yadav, Carl A. Sorensen, Chien-Teh Kao, Suhail Anwar +1 more | 2019-06-04 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-06-04 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-04-16 |
| 10170569 | Thin film transistor fabrication utlizing an interface layer on a metal electrode layer | Dong-Kil Yim | 2019-01-01 |
| 10134878 | Oxygen vacancy of IGZO passivation by fluorine treatment | Hao-Chien Hsu, Dong-Kil Yim, Xuena Zhang, Won Ho SUNG, Rodney Shunleong Lim | 2018-11-20 |
| 10002711 | Low temperature multilayer dielectric film for passivation and capacitor | Dapeng Wang, Yixuan Wu, Gaku Furuta, Beom Soo Park | 2018-06-19 |
| 9935183 | Multilayer passivation or etch stop TFT | Dong-Kil Yim, Seon-Mee Cho, John M. White | 2018-04-03 |
| 9887277 | Plasma treatment on metal-oxide TFT | Soo Young Choi, Beom Soo Park, Yi Cui, Dong-Kil Yim | 2018-02-06 |
| 9634039 | SiON gradient concept | Soo Young Choi, Dong-Kil Yim, Yi Cui, Xuena Zhang | 2017-04-25 |
| 9590113 | Multilayer passivation or etch stop TFT | Dong-Kil Yim, Seon-Mee Cho, John M. White | 2017-03-07 |
| 9502242 | Indium gallium zinc oxide layers for thin film transistors | John M. White, Soo Young Choi, Jung-Chi Lu | 2016-11-22 |
| 9245809 | Pin hole evaluation method of dielectric films for metal oxide semiconductor TFT | Dong-Kil Yim, Seon-Mee Cho | 2016-01-26 |