Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123091 | Substrate processing apparatus and method of manufacturing semiconductor device | Takashi Nogami, Tomoshi Taniyama, Daigi KAMIMURA | 2024-10-22 |
| 12107397 | Electric discharge device and electrode device | Yohei Ishigami, Takafumi Omori, Tetsunori Aono, Sadahiko Wakaba | 2024-10-01 |
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Tomoshi Taniyama | 2024-08-13 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII +1 more | 2024-03-19 |
| 11846025 | Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method therefor | Masamichi YACHI | 2023-12-19 |
| 11786922 | Voltage application device and discharge device | Tetsunori Aono, Jumpei Oe, Yohei Ishigami, Kana Shimizu, Takafumi Omori +1 more | 2023-10-17 |
| 11694907 | Substrate processing apparatus, recording medium, and fluid circulation mechanism | Toshiki Fujino, Atsushi UMEKAWA | 2023-07-04 |
| 11552457 | Discharge device and method for manufacturing same | Youhei Ishigami, Masaharu Machi, Takafumi Omori, Tomohiro Yamaguchi, Osamu Imahori +2 more | 2023-01-10 |
| 11512392 | Substrate processing apparatus | Takashi Nogami, Tomoshi Taniyama, Daigi KAMIMURA | 2022-11-29 |
| 11495477 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Tomoshi Taniyama | 2022-11-08 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII +1 more | 2022-09-20 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Tomoshi Taniyama | 2022-01-11 |
| 11211277 | Substrate processing apparatus | Takeshi Ito | 2021-12-28 |
| 11155920 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Tomoshi Taniyama | 2021-10-26 |
| 11124873 | Substrate processing apparatus | Tomoshi Taniyama, Kenji Shirako | 2021-09-21 |
| D925480 | Electrostatic atomized water particles generating module | Jumpei Oe, Youhei Ishigami, Kana Shimizu, Takafumi Omori, Tetsunori Aono | 2021-07-20 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Tomoshi Taniyama | 2021-03-16 |
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Tomoshi Taniyama | 2020-10-20 |
| 10689758 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Tomoshi Taniyama | 2020-06-23 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Tomoshi Taniyama | 2020-04-07 |
| 10550468 | Substrate processing apparatus | Tomoshi Taniyama, Kenji Shirako | 2020-02-04 |
| 10529605 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA | 2020-01-07 |
| 10508336 | Substrate processing apparatus | Takashi Nogami, Tomoshi Taniyama, Daigi KAMIMURA | 2019-12-17 |
| 10099232 | Electrostatic atomizing device | Tetsunori Aono, Tomohiro Yamaguchi, Takafumi Omori, Osamu Imahori, Youhei Ishigami | 2018-10-16 |
| 9460945 | Substrate processing apparatus for semiconductor devices | Shigeo Nakada | 2016-10-04 |