Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7645509 | Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing | Kunio Harada, Masao Kamahori, Hideki Kambara, Sumio Yamaguchi | 2010-01-12 |
| 7419577 | Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing | Kunio Harada, Masao Kamahori, Hideki Kambara, Sumio Yamaguchi | 2008-09-02 |
| 7264677 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Kazuto Watanabe | 2007-09-04 |
| 7025896 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Kazuto Watanabe | 2006-04-11 |
| 6821446 | Removal method for coating of polymer coated glass capillary tubing and polymer coated glass capillary tubing | Kunio Harada, Masao Kamahori, Hideki Kambara, Sumio Yamaguchi | 2004-11-23 |
| 6664184 | Method for manufacturing semiconductor device having an etching treatment | Miwako Nakahara, Kazuto Watanabe | 2003-12-16 |
| 6613242 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Kazuto Watanabe | 2003-09-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Toshiyuki Arai, Miwako Nakahara +3 more | 2003-08-19 |
| 6537461 | Process for treating solid surface and substrate surface | Miwako Nakahara, Toshiyuki Arai, Shigeru Ohno, Takashi Yunogami, Kazuto Watanabe | 2003-03-25 |
| 6451665 | Method of manufacturing a semiconductor integrated circuit | Takashi Yunogami, Kazuo Nojiri, Yuzuru Ohji, Masahiko Hiratani, Yuichi Matsui | 2002-09-17 |
| 6326218 | Semiconductor integrated circuit and its manufacturing method | Takashi Yunogami, Kazuo Nojiri, Yuzuru Ohji, Masahiko Hiratani, Yuichi Matsui | 2001-12-04 |
| 5747387 | Removal method of organic matter and system for the same | Koutarou Koizumi, Kazuhiko Kawai, Maki Shimoda, Katsuhiko Itoh, Haruo Itoh +1 more | 1998-05-05 |
| 5503708 | Method of and apparatus for removing an organic film | Kootaroo Koizumi, Kenichi Kawasumi, Takeshi Kimura, Keisuke Funatsu | 1996-04-02 |
| 5478401 | Apparatus and method for surface treatment | Keisuke Funatsu, Kenichi Kawasumi, Akio Inada, Masaro Kaku | 1995-12-26 |
| 4792842 | Semiconductor device with wiring layer using bias sputtering | Yoshio Honma, Natsuki Yokoyama, Hiroshi Morisaki | 1988-12-20 |
| 4717462 | Sputtering apparatus | Yoshio Homma, Shunji Sasabe | 1988-01-05 |
| 4599135 | Thin film deposition | Yoshio Homma, Hiroshi Morisaki, Sadayuki Okudaira, Kiichiro Mukai | 1986-07-08 |
| 4394245 | Sputtering apparatus | Yoshio Homma, Hiroshi Morisaki, Seiki Harada | 1983-07-19 |