| 6894334 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
2005-05-17 |
| 6734104 |
Method of manufacturing a semiconductor device and a semiconductor device |
Kazusato Hara, Toshinori Imai, Junji Noguchi, Naohumi Ohashi |
2004-05-11 |
| 6548847 |
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
2003-04-15 |
| 6495466 |
Method of manufacturing a semiconductor device and a semiconductor device |
Kazusato Hara, Toshinori Imai, Junji Noguchi, Naohumi Ohashi |
2002-12-17 |
| 6342412 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
2002-01-29 |
| 6169324 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
2001-01-02 |
| 6127255 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
2000-10-03 |
| 5811316 |
Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
1998-09-22 |
| 5780882 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
1998-07-14 |
| 5739589 |
Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
1998-04-14 |
| 5557147 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
1996-09-17 |
| 5503708 |
Method of and apparatus for removing an organic film |
Kootaroo Koizumi, Sukeyoshi Tsunekawa, Kenichi Kawasumi, Takeshi Kimura |
1996-04-02 |
| 5478401 |
Apparatus and method for surface treatment |
Sukeyoshi Tsunekawa, Kenichi Kawasumi, Akio Inada, Masaro Kaku |
1995-12-26 |
| 5331191 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
1994-07-19 |
| 5202275 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more |
1993-04-13 |