Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362136 | Apparatus and method for measuring pedestal voltage uniformity in plasma processing chambers | — | 2025-07-15 |
| 12347677 | Enhanced ignition in inductively coupled plasmas for workpiece processing | Shawming Ma | 2025-07-01 |
| 12272532 | Inductive broad-band sensors for electromagnetic waves | Alexandre De Chambrier, Ivan Shkurenkov | 2025-04-08 |
| 12027351 | Plasma non-uniformity detection | Alexandre De Chambrier | 2024-07-02 |
| 12002652 | Variable mode plasma chamber utilizing tunable plasma potential | Shawming Ma | 2024-06-04 |
| 11887820 | Sector shunts for plasma-based wafer processing systems | Alexandre De Chambrier | 2024-01-30 |
| 11848204 | Enhanced ignition in inductively coupled plasmas for workpiece processing | Shawming Ma | 2023-12-19 |
| 11830708 | Inductive broad-band sensors for electromagnetic waves | Alexandre De Chambrier | 2023-11-28 |
| 11670488 | Fast arc detecting match network | Alexandre De Chambrier | 2023-06-06 |
| 11605527 | Pulsing control match network | Alexandre De Chambrier | 2023-03-14 |
| 11521832 | Uniformity control for radio frequency plasma processing systems | Alexandre De Chambrier | 2022-12-06 |
| 11348784 | Enhanced ignition in inductively coupled plasmas for workpiece processing | Shawming Ma | 2022-05-31 |
| 11251075 | Systems and methods for workpiece processing using neutral atom beams | — | 2022-02-15 |
| 11189464 | Variable mode plasma chamber utilizing tunable plasma potential | Shawming Ma | 2021-11-30 |
| 11049692 | Methods for tuning plasma potential using variable mode plasma chamber | Shawming Ma | 2021-06-29 |
| 10544519 | Method and apparatus for surface preparation prior to epitaxial deposition | Miguel Saldana, Dan Cossentine, Hae Young Kim, Subramanian Tamilmani, Niloy Mukherjee +1 more | 2020-01-28 |
| 10526708 | Methods for forming thin protective and optical layers on substrates | Carl Galewski, Hood Chatham, Sai Mantripragada, Allan B. Wiesnoski, Sooyun Joh | 2020-01-07 |
| 10294562 | Exhaust manifold in a CVD reactor | Carl Galewski, Merim MUKINOVIC | 2019-05-21 |
| 10049859 | Plasma generating units for processing a substrate | Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh | 2018-08-14 |
| 9852887 | Ion source of an ion implanter | Xiao Bai, Zhimin Wan, Peter M. Kopalidis | 2017-12-26 |
| 9831466 | Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier | Allan B. Wiesnoski, Carl Galewski | 2017-11-28 |
| 9721759 | System and method for distributing RF power to a plasma source | Richard K. Karlquist, Robert Eugene Weisse | 2017-08-01 |
| 9653253 | Plasma-based material modification using a plasma source with magnetic confinement | William F. DiVergilio, Susan Felch, Tienyu Sheng, Hao Chen | 2017-05-16 |
| 9443702 | Methods for plasma processing | Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh | 2016-09-13 |
| 9359674 | Apparatus and method for dielectric deposition | Sai Mantripragada, Sooyun Joh, Allan B. Wiesnoski, Carl Galewski | 2016-06-07 |