Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Naveed Ansari, Yoshie Kimura, Kazi Sultana, Radhika Mani +5 more | 2021-11-09 |
| 10658174 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Naveed Ansari, Yoshie Kimura, Kazi Sultana, Radhika Mani +5 more | 2020-05-19 |
| 7311852 | Method of plasma etching low-k dielectric materials | Helen Zhu, S. M. Reza Sadjadi, James V. Tietz, Bryan A. Helmer | 2007-12-25 |
| 7166535 | Plasma etching of silicon carbide | S. M. Reza Sadjadi, James V. Tietz | 2007-01-23 |
| 6919278 | Method for etching silicon carbide | Sean S. Kang, S. M. Reza Sadjadi | 2005-07-19 |
| 6875699 | Method for patterning multilevel interconnects | Stephan Lassig, S. M. Reza Sadjadi, Vinay Pohray, Thomas W. Mountsier, Chiu Chi | 2005-04-05 |
| 6670278 | Method of plasma etching of silicon carbide | Helen Zhu, S. M. Reza Sadjadi, David R. Pirkle, James R. Bowers, Michael Goss | 2003-12-30 |