Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7311852 | Method of plasma etching low-k dielectric materials | Si Yi Li, Helen Zhu, S. M. Reza Sadjadi, James V. Tietz | 2007-12-25 |
| 6540885 | Profile control of oxide trench features for dual damascene applications | Douglas Keil, Eric Wagganer | 2003-04-01 |