| 11651509 |
Method, system and computer program product for 3D-NAND CDSEM metrology |
Roman Kris, Roi Meir, Sahar LEVIN, Ishai Schwarzband, Grigory Klebanov +6 more |
2023-05-16 |
| 11301983 |
Measuring height difference in patterns on semiconductor wafers |
Ishai Schwarzband, Yan Avniel, Sergey Khristo, Mor Baram, Doron Girmonsky +1 more |
2022-04-12 |
| 10748272 |
Measuring height difference in patterns on semiconductor wafers |
Ishai Schwarzband, Yan Avniel, Sergey Khristo, Mor Baram, Doron Girmonsky +1 more |
2020-08-18 |
| 10731979 |
Method for monitoring nanometric structures |
Ishai Schwarzband, Roman Kris |
2020-08-04 |
| 10354376 |
Technique for measuring overlay between layers of a multilayer structure |
Yakov Weinberg, Ishai Schwarzband, Roman Kris, Itay Zauer, Ran Goldman +3 more |
2019-07-16 |
| 9916652 |
Technique for measuring overlay between layers of a multilayer structure |
Yakov Weinberg, Ishai Schwarzband, Roman Kris, Itay Zauer, Ran Goldman +3 more |
2018-03-13 |
| 9530199 |
Technique for measuring overlay between layers of a multilayer structure |
Yakov Weinberg, Ishai Schwarzband, Roman Kris, Itay Zauer, Ran Goldman +3 more |
2016-12-27 |
| 9165376 |
System, method and computer readable medium for detecting edges of a pattern |
Ishai Schwartzband, Roman Kris |
2015-10-20 |
| 5628667 |
Sinuous toy |
— |
1997-05-13 |