Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8455359 | Semiconductor devices and methods of manufacturing the same | Kook-Joo Kim, Jin Ho Kim, Pil-Kwon Jun, Sun-Hee Park, Gyoung-Eun Byun | 2013-06-04 |
| 8361274 | Etching apparatus and etching method | Kwang-Myung Lee, Ki-Young Yun, Il-Kyoung Kim, Sung-wook Park, No-Hyun Huh +8 more | 2013-01-29 |
| 8083507 | Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft | Tea-Jin Park, Kwang-Myung Lee, Sang-Gon Lee | 2011-12-27 |
| 7985297 | Method of cleaning a quartz part | Jung-Dae Park, Pil-Kwon Jun, Bo-yong Lee, Tae-Hyo Choi, Da-Hee Lee | 2011-07-26 |
| 7976785 | Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus | Sang-Gon Lee, In Ju Lee, Kyoung-hye Lee, Yong Hee Lee, Jin-ok Jung +1 more | 2011-07-12 |
| 7951653 | Methods of manufacturing a semiconductor device using compositions for etching copper | Jung-Dae Park, Da-Hee Lee, Pil-Kwon Jun, Kwang-Shin Lim | 2011-05-31 |
| 7880138 | Apparatus and method for analyzing contaminants on wafer | Jae Seok Lee, Heung Bin Lim, Won Ryu, Yang-Koo Lee, Hun-Jung Yi | 2011-02-01 |
| 7879736 | Composition for etching silicon oxide and method of forming a contact hole using the same | Dong Won Hwang, Kook-Joo Kim, Jung In La, Pil-Kwon Jun, Yang-Koo Lee | 2011-02-01 |
| 7687448 | Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition | Jung-Dae Park, Pil-Kwon Jun, Myoung-Ok Han, Se-Yeon Kim, Kwang-Shin Lim +2 more | 2010-03-30 |
| 7608540 | Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition | Jung-Dae Park, Pil-Kwon Jun, Myoung-Ok Han, Se-Yeon Kim, Kwang-Shin Lim +2 more | 2009-10-27 |
| 7556712 | Laser cleaning of backside of wafer for photolithographic processing | Hun-Jung Yi | 2009-07-07 |
| 7497963 | Etching method | Kwang-Myung Lee, Ki-Young Yun, No-Hyun Huh, Wan-Goo Hwang, Jung-Hyun Hwang +3 more | 2009-03-03 |
| 7417709 | Method and apparatus for exposing semiconductor substrates | Sang Ho Lee, Jin Choi, Dong-Hwa Shin, Byong-Cheol Park | 2008-08-26 |
| 7335601 | Method of processing an object and method of controlling processing apparatus to prevent contamination of the object | Jae Hyun Han, Kee-soo Park | 2008-02-26 |
| 7265818 | Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same | Byong-Cheol Park, Dong-Hwa Shin, Sang Ho Lee | 2007-09-04 |
| 7232552 | Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus | Sang-Gon Lee, In Ju Lee, Kyoung-hye Lee, Yong Hee Lee, Jin-ok Jung +1 more | 2007-06-19 |
| 7170070 | Ion implanters having an arc chamber that affects ion current density | Ui Hui Kwon, Gyeong-Su Keum, Won-Young Chung, Kwang-Ho Cha, Young Tae Kim +3 more | 2007-01-30 |
| 7112810 | Ion implanting apparatus and ion implanting method using the same | Gyeong-Su Keum, Hyung-Sik Hong, Sang Yeob Cha, Jae Hyun Han, Tae-Sub Im +3 more | 2006-09-26 |
| 7040336 | Gas delivery system for supplying gas to semiconductor manufacturing equipment | Yu-kweon Kim, Jai-Kang Jeon, Young Seok Roh, Yong-Wook Lee | 2006-05-09 |
| 6910954 | Method of supplying slurry and a slurry supply apparatus having a mixing unit at a point of use | Sue KIM, Seung-Un Kim, Je-Gu Lee, Seung-Hoon Ahn | 2005-06-28 |
| 6869500 | Method for processing a wafer and apparatus for performing the same | Kwang-Myung Lee, Mikio Takagi, Jae-Hyuk An, Jea-Wook Kim | 2005-03-22 |
| 6814835 | Apparatus and method for supplying chemicals in chemical mechanical polishing systems | Seung-Un Kim, Je-Gu Lee, Sue KIM | 2004-11-09 |
| 6602323 | Method and apparatus for reducing PFC emission during semiconductor manufacture | Sang-Gon Lee, Sang-Hyuk Chung, Seong-Jin Heo | 2003-08-05 |
| 6071350 | Semiconductor device manufacturing apparatus employing vacuum system | Jae-Sun Jeon, Won-Yeong Kim, Yun-mo Yang | 2000-06-06 |
| 6039770 | Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers | Yun-Sik Yang, Hun Cha | 2000-03-21 |