Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283497 | Semiconductor deposition monitoring device | Young Uk Choi, Yeon Tae Kim, Tae Soon Park, Sung Gyu Park, Kwang-Hyun Yang +1 more | 2025-04-22 |
| 10541182 | Method of inspecting semiconductor substrate and method of manufacturing semiconductor device | Yeon Tae Kim, Do Hyung Kim, Kwang-Hyun Yang, Chang Yun Lee, Young Uk Choi +1 more | 2020-01-21 |
| 10196738 | Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system | Chang Yun Lee, Ju Hyun Lee, Kyu-Hee Han, Seung Hun Lee, Byung Chul Jeon | 2019-02-05 |
| 7335601 | Method of processing an object and method of controlling processing apparatus to prevent contamination of the object | Jae Hyun Han, Seung-Ki Chae | 2008-02-26 |