Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7417709 | Method and apparatus for exposing semiconductor substrates | Sang Ho Lee, Jin Choi, Dong-Hwa Shin, Seung-Ki Chae | 2008-08-26 |
| 7265818 | Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same | Dong-Hwa Shin, Seung-Ki Chae, Sang Ho Lee | 2007-09-04 |
| 7155915 | Temperature controller for a semiconductor-fabricating tool | Dong-Hwa Shin, Sang Ho Lee, Sung-wook Park | 2007-01-02 |